臺灣博碩士論文加值系統

近年來加熱器逐漸朝向微型化與可攜帶性的方向持續發展演進，可撓性電熱加熱器在可穿戴電子產品被廣泛應用以及作為醫療設備上的撓性加熱器引起廣泛的關注，高效電熱加熱器需要同時具備較高之電導率及導熱率以達到有效地產生焦耳熱，低輸入電壓對於確保加熱器安全使用至關重要。然而，低電壓通常導致低的加熱溫度及加熱速率，如何在低電壓狀態下並保持高電熱效率仍然是個挑戰。由於石墨烯的優勢在於其獨特的熱、機械、化學、和光特性等，賦予石墨烯在各個領域上具備相當的潛力應用，包括計算、醫學、電子產品、水淨化、防水材料、能量儲存等，吸引了許多研究人員的注意，石墨烯具有高的熱傳導率（5000 W m-1K-1），出色的導熱性確保石墨烯可以提供快速響應和均勻的溫度分佈，以及低的輸出電壓使其具備高安全性，這對於加熱器非常重要，而石墨烯的二維六邊形共軛結構賦予其良好的機械彎曲性能使其在撓性加熱器中具有巨大的優勢，基於石墨烯的電熱加熱裝置具有高的能量轉換效率，快速的電熱響應和可撓性的優點。由於這些設備也是透明的，因此它們也可以用於窗戶除霜器，戶外顯示器，電子皮膚和氣體感測器等應用中。因此，可以由文獻中找到許多製造基於石墨烯的高質量微型加熱器的技術，迄今為止，已開發出多種方法來製作石墨烯微加熱器，包括化學氣相沉積，光刻，噴射印刷和雷射。直接雷射寫入是一種快速，可擴展且非接觸式的工藝，可以在石墨烯上製造微結構。隨著現在技術的飛速發展，在醫療保健、電子產品、機械設備等，可撓式加熱器變的越來越重要，將石墨烯旋塗於可撓式PET基板上，通過加熱使石墨稀油墨與基材良好結合，從而使石墨烯薄膜具備出色的可彎曲性，對於可穿戴之設備應用如熱夾克、熱袋與人造皮膚之類，非常需要電器安全性、可撓性、高轉換效率、重量輕以及低成本的要求。雷射直寫可以在PET基板表面上加工高精度電極圖案化，並能輕鬆的製作所需加熱器及感測器之形狀，形狀通過計算機設計並可以通過軟件輕鬆修改，雷射加工不需要任何化學試劑，因此是一種清潔且環保的加工方式，雷射使一種可擴展及低成本的非接觸式工藝。在這裡，我們提出一種簡單、快速、低成本之雷射直寫，用於製造高品質之石墨烯微加熱器電極與石墨稀感測器電極結合，以對NO氣體進行檢測，在最佳的實驗條件下，開發的石墨烯微加熱器與石墨烯感測器成功應用於加熱方面與NO氣體感測之成果。本研究開發了一種可用於高效溫度控制的可撓性石墨烯微加熱器，並通過超快雷射燒蝕具有出色的長期性能。討論了輸入電壓（V），電極寬度（W）和電極圖案（2-4指），以確定它們對微加熱器的電熱響應和開關性能的影響。實驗結果證實了微加熱器在不同輸入電壓下的開-關操作過程中的出色性能。在W = 500 m變化的電極模式的情況下，從10 V到30 V的輸入電壓，穩態時間tss小於3 s，穩態時間tss定義為可撓性加熱器從室溫達到穩態溫度時所花費的時間，它是確定可撓性加熱器動態性能的一個關鍵參數。使用超快雷射燒蝕，微加熱器的加熱速率高達15.7 ˚C/ s。實驗結果表明，隨著電極指數量的減少，加熱器溫度相對於輸入電壓的增加速率增加，特別是在高輸入電壓下。熱循環和彎曲實驗表明，微加熱器具有出色的溫度穩定性和耐用性（<1 ˚C）。本研究表明，可撓性石墨烯微加熱器是一種高效且可靠的設備，適用於使用超快雷射燒蝕的加熱應用。並且基於石墨烯微加熱器之結構增加石墨烯感測器，通過一次性加工製作可用於高性能之氣體感測器，近年來，石墨烯感測器設計在各方面取得了很多突出成果，各種石墨烯感測器被製作出來，石墨烯基氣體感測器具備超高的選擇性與靈敏度，但由於吸附的氣體分子與石墨烯相互作用使得恢復速率較慢，因此本研究將石墨烯微加熱器結合感測器應用以加熱方式對感測器吸附之氣體進行解吸附，使感測器恢復速率加快。

In recent years, heaters have gradually evolved toward miniaturization and portability.Flexible electric heaters have been widely applied in wearable electronic products.Also, more concerns emphasize on the application of flexible heaters in medical equipment.High-efficiency electric heaters require high electrical conductivity and thermal conductivity to effectively generate Joule heat at the same time. In addition, Low input voltage is essential to ensure the safety of using the heater. However, low voltage usually results in low heating temperature and heating rate. In this case, how to maintain high electrothermal efficiency under low voltage is still a challenge.Due to graphene’s unique thermal, mechanical, chemical, and optical properties, it gives graphene considerable potential applications in various fields, including computing, medicine, electronic products, water purification, waterproof materials, energy storage, etc. Therefore, it has brought attention to many researchers. Graphene has a high thermal conductivity (5000 W m-1K-1) as well as excellent thermal conductivity so it can provide rapid response and uniform temperature distribution. Meanwhile, low output voltage makes the heaters possess high safety which is very important for heaters. Moreover, two-dimensional hexagonal conjugated structure of graphene provides good mechanical bending properties which contributes a great advantage in flexible heaters. The advantages of Graphene-based electric heating device includes high energy conversion efficiency, fast electrothermal response and flexibility. Since these devices are transparent, they can also be used in applications such as window defrosters, outdoor displays, electronic skins, and gas sensors. As a result, many techniques for manufacturing high-quality graphene-based micro heaters can be found in the literature. To date, a variety of methods have been developed to make graphene micro heaters, including chemical vapor deposition, lithography, jet printing, and laser Shoot. Direct laser writing is a fast, scalable, and non-contact process that can produce microstructures on graphene.With the rapid development of current technology, flexible heaters have become more and more important in healthcare, electronic products, and mechanical equipment. Graphene is spin-coated on a flexible PET substrate, and the graphene ink is heated Good combination with the substrate and also the graphene ink for heated in combination with good substrate, so that the graphene thin film with excellent bendability, the wearable device with applications such as heat jackets, the heat bag and the artificial skin for the like, a great need for electrical safety, flexibility, high conversion efficiency, Laser direct writing can process high-precision electrode patterning on the surface of the PET substrate, and can easily produce the desired shape. The shape is designed by computer and can be easily modified by software. Laser processing does not require any chemical reagents, so it is a kind of Clean and environmentally friendly processing method, laser makes a scalable with for low-cost non-contact process.Herein, we propose a simple, fast and low-cost laser direct writing method for manufacturing high-quality graphene micro heater electrodes combined and graphene sensor electrodes to detect NO gas. Under the experimental conditions, the developed graphene micro-heater with graphene sensor were successfully applied to the results of heating and NO gas sensing.This study developed a flexible graphene micro-heater that can be used for high efficient temperature control and has outstanding long-term performance using ultrafast laser ablation. The input voltages (V), electrode widths (W), and electrode patterns (2-4 finger) were discussed to determine their effects on electrothermal response and switching performance of the micro-heaters. The experimental results confirmed that outstanding performance of the micro-heaters during on−off operation under varying input voltages. At the condition of W=500μ m, time to steady state (tss) were less than 3 seconds for the input voltages from 10 V to 30 V under varying electrode patterns.The micro-heater exhibited a superior heating rate of 15.7 ˚C/s using ultrafast laser ablation. The response time, the time consumption for the heater to reach the steady-state temperature from room temperature, is another crucial parameter in determining the dynamic performance of the flexible heater. The experimental results revealed that under high input voltages, if the number of electrode fingers decreased, increasing rate of heater temperature with respect to input voltage may increase. The thermal cycling and bending experiments revealed that the micro-heater has excellent temperature stability and durability (< 1 ˚C). The present study showed that the flexible graphene micro-heater is a high efficient and a reliable device for heating applications using ultrafast laser ablations. And based on the structure of graphene micro heaters, graphene sensors are added, and gas sensors that can be used for high performance are manufactured through one-time processing.In recent years, graphene sensor design has achieved many outstanding results in various aspects, and various graphene sensors have been produced. , graphene-based gas sensor includes ultra-high selectivity and sensitivity, but due to adsorption of gas molecules such that interaction of graphene recovery rate is slower, so the present study bonding the graphene micro heater in a heating mode sensor applications the sensor adsorption The desorption of the gas accelerates the recovery rate of the sensor.

摘 要 i
ABSTRACT iv
誌 謝 vii
目 錄 viii
表目錄 xi
圖目錄 xii
第一章 緒論 1
1.1前言 1
1.1 石墨烯簡介 2
1.2加熱器簡介 4
1.3感測器簡介 5
1.4文獻回顧 6
1.5研究目的 10
第二章 理論基礎、研究方法 12
2.1 紅外線熱影像即時溫度分析系統原理 12
2.1.1 熱像儀結構 13
2.1.2 放射率 14
2.2 熱傳導理論 15
2.3 Raman(拉曼光譜分析) 18
2.3.1石墨烯拉曼光譜 18
2.4掃描式電子顯微鏡(SEM) 22
第三章 實驗架構 24
3.1皮秒雷射(P S Laser) 24
3.1.1石墨烯基版製備 24
3.1.2皮秒雷射規格 24
3.1.2石墨烯微加熱器製備 25
3.2熱像儀量測 27
3.2.1測量儀器 27
3.2.2拍攝流程 28
3.3石墨烯微加熱器實驗架構 29
3.3.1 實驗樣品 29
3.3.2實驗設置 29
3.2.3實驗參數 31
3.2.4實驗方法 32
3.4石墨烯微加熱器感測器實驗架構 34
3.4.1 實驗樣品 34
3.4.2實驗設置 34
3.4.3實驗參數 35
3.4.4實驗方法 35
第四章 結果與討論 37
4.1石墨烯微加熱器實驗結果 37
4.1.1石墨烯電極、I-V特性、電阻變化 37
4.1.2石墨烯特性Raman、SEM結構量測 38
4.1.3石墨烯微加熱器電熱響應 43
4.1.4石墨烯微加熱器與COMSOL模擬對比 51
4.1.5石墨烯微加熱器輸入電壓與溫度影響 52
4.1.6石墨烯微加熱器熱循環測式 56
4.2石墨烯微加熱器感測器實驗結果 58
4.2.1石墨烯微加熱器感測器電極 58
4.2.2石墨烯微加熱器感測器電阻響應 58
4.2.3石墨烯微加熱器感測器NO氣體響應 61
第五章 結論與未來展望 67
5.1結論 67
5.2未來展望 68
參考文獻 69

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