臺灣博碩士論文加值系統

封面.......................................................................i
書名頁.....................................................................ii
論文口試委員審定書.........................................................iii
論文授權書.................................................................iV
簽署人須知..................................................................V
中文摘要...................................................................Vi
英文摘要.................................................................Viii
致謝.......................................................................X
目錄......................................................................iX
圖目錄....................................................................Xii
表目錄...................................................................XVii


第一章 緒論
1.1 前言
1.2 虛實整合系統(Cyber-Physical System, CPS)
1.3 智慧工廠(Smart Factory)
1.4 卷對卷(Roll-to-Roll, R2R)
1.5 偏光膜(Polarizing Film)
1.6 研究背景與目的
1.7 文獻回顧
1.7.1 自製感測器
1.7.2 微溫度感測器
1.7.2.1 微熱電偶
1.7.2.2 電阻式微溫度感測器
1.7.3 微濕度感測器
1.7.4 微流量感測器
1.8 研究方法
第二章 整合型微感測器原理、設計與製程開發
2.1 微溫度感測器
2.1.1 溫度感測器之種類
2.1.2 電阻式溫度感測器之原理
2.1.3 微溫度感測器之設計
2.2 微濕度感測器
2.2.1 濕度感測器之種類
2.2.2 電阻式與電容式濕度感測器之原理
2.3 微流量感測器
2.3.1 流量感測器之種類
2.3.2 熱線式流量感測器之原理
2.3.3 熱量計型流量感測器之原理
2.4 整合型微感測器之設計
2.5 整合型微感測器之製作流程
2.5.1 聚醯亞胺薄膜清洗
2.5.2 薄膜沉積(鉻&金)
2.5.3 微影製程(黃光製程)
第三章 感測器校正
3.1 整合型微感測器之裁切與接線
3.2 整合型微感測器之可靠度測試
3.2.1 微溫度感測器之可靠度測試 (溫度校正)
3.2.2 微濕度感測器之可靠度測試 (濕度校正)
3.2.3 微流量感測器之可靠度測試 (流量校正)
第四章 感測器監測模組軟體設計
4.1 監測模組開發板挑選
4.2 Arduino程式撰寫
4.2.1 微溫度感測器讀取程式設計
4.2.2 微濕度感測器讀取程式設計
4.2.3 微流量感測器讀取程式設計
4.2.4 整合型微感測器數據之無線傳輸與紀錄儲存
第五章 感測器模組實測與性能比較
5.1 商購感測器
5.1.1 商購感測器模組
5.1.2 商購感測器模組測試數據
5.1.3 商購感測器模組封裝與抗蝕處理
5.2 自製整合型感測器與商購感測器之監測數據與比較
5.2.1 溫度感測器之監測數據與比較
5.2.2 濕度感測器之監測數據與比較
5.3 自製整合型感測器監測模組尚待解決與可改善之處
第六章 結論與展望
6.1 結論
6.2 展望
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