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研究生:鄭杰晰
研究生(外文):Jie-SiJheng
論文名稱:具電壓調變波型能力之雙波段紫外光檢測器
論文名稱(外文):Dual-band Ultraviolet Photodetector with Voltage-tunable Spectrum Ability
指導教授:張守進張守進引用關係
指導教授(外文):Shoou-Jinn Chang
學位類別:博士
校院名稱:國立成功大學
系所名稱:微電子工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2021
畢業學年度:109
語文別:英文
論文頁數:141
中文關鍵詞:雙波氧化鎂鋅氧化鋅三氧化二鎵氮化鎵二氧化矽紫外光
外文關鍵詞:dual-bandMgZnOZnOGa2O3GaNSiO2UV light
相關次數:
  • 被引用被引用:0
  • 點閱點閱:138
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摘要 Ⅰ
Abstract III
Acknowledgments V
Table of Contents VI
List of Tables VII
List of Figures IX
Chapter 1 Introduction 1
1.1 Organization of the Dissertation 1
1.2 Background of Ultravoielt Photodetector 1
1.3 Overviews of Dual-band Ultraviolet Photodetector 3
Reference 6
Chapter 2 Relevant Theory and Experiment Equipment 9
2.1 Theory of Ultraviolet Photodetector 9
2.2 The Feature of UV PD Materials 12
2.3 Photodetector Analysis Method 13
2.4 Experiment Equipment 19
Chapter 3 Ultraviolet Photodetector Using ZnO, MgZnO, or Ga2O3 Materials 22
3.1 ZnO Ultraviolet Photodetector 22
3.2 Ga2O3 Ultraviolet Photodetector 31
3.3 MgZnO Ultraviolet Photodetector 40
Chapter 4 Ultraviolet Photodetector with Voltage-tunable Spectrum Ability 73
4.1 Voltage-tunable UVB to UVA photodetector 73
4.2 Voltage-tunable UVC to UVB photodetector 88
4.3 Voltage-tunable UVC to UVA photodetector 110
Chapter 5 Conclusion and Future Work 129
5.1 Conclusion 129
5.2 Future Work 131
Reference 132
APPENDICES 140
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