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研究生:甘慶霖
研究生(外文):Kam, Heng Lam
論文名稱:鎳矽多層膜之應用與可靠度
論文名稱(外文):Application and Reliability of Ni/amorphous-Si Reactive Multilayers
指導教授:周苡嘉
指導教授(外文):Chou, Yi-Chia
口試委員:莊振益蘇冠暐羅友杰
口試委員(外文):Juang, Jenh-YihSu, Kuan-WeiLo, Yu-Chieh
口試日期:2020-08-18
學位類別:碩士
校院名稱:國立交通大學
系所名稱:電子物理系所
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2020
畢業學年度:109
語文別:中文
論文頁數:47
中文關鍵詞:鎳矽多層膜磁控濺鍍機自蔓延反應多層膜反應機制
外文關鍵詞:Ni/amorphous Si reactive multilayerssputterself-propagating reactionreaction phenomenon
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反應性多層膜是由兩種或以上的放熱反應材料以奈米級的厚度交互堆疊至微米級而製成的能源材料,會藉由脈衝雷射等激發源對材料局部區域瞬間的刺激,該區域的原子會交互擴散來快速釋放儲存的反應熱,並且觸發周圍的區域也發生反應,產生無須氣體參與的自蔓延火焰再蔓延到整片樣品。本實驗使用磁控濺鍍系統,透過交互濺鍍的方式輪流濺鍍鎳和矽在塗有光阻的矽(100)基板上,並且利用丙酮將光阻去除以得到無基板的鎳矽多層膜,再使用雷射激發以研究其反應速率。
鎳矽多層膜可實際應用在焊接或太陽能電池的電極接觸材料等,我們會藉由磁控濺鍍機搭配低溫冷卻載台降低樣品製程中的能量累積,再使用高速攝影機、掃描式電子顯微鏡、穿透式電子顯微鏡以及X光繞射儀等技術,觀察鎳矽多層膜之反應速率、形成的產物結構、晶相,藉此了解鎳矽多層膜對多層膜的面積、鎳矽的原子比例以及反應前的氧化等不同情況下的可靠度。最後會研究多層膜實際應用在基板上的結果與表現。
Reactive multilayers are energetic material composed of nanoscale interlaced exothermic reactants. By a localized heat treatment like pulse laser, a portion of multilayers intermixes and releases latent heat of reaction, which further mixes the adjacent region and generates self-propagating flame without involvement of gas. We use magnetron sputter system to in turn sputter nickel and amorphous silicon on photoresist coated Si(100) substrate, and use acetone to lift off multilayers on the substrate, and ignite the multilayers with laser to investigate its self-propagating speed.
Ni/Si reactive multilayers can application on welding or contact material of solar cell, we use cooling stage to reduce process temperature. High-speed photography, scanning electron microscope, transmission electron microscope and X-ray diffractometer are utilize to investigate the self-propagating speed and phase of reaction product so as to study the reliability of different area, atomic ratio and oxidation period before ignition. Lastly, we ignite the multilayers on real substrates and study its performance.
中文摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 ix
一、導論 1
二、實驗方法與步驟 5
2.1 基板在製程前的處理 5
2.2 鎳矽多層膜的製備 6
2.3 自蔓延反應的激發 8
2.4 高速攝影技術 8
2.5 顯微觀測用樣品製備 9
2.6 掃描式電子顯微鏡(Scanning Electron Microscope, SEM) 11
2.7 穿透式電子顯微鏡(Transmission Electron Microscope, TEM) 12
2.8 能量散佈能譜儀(Energy Dispersive Spectrometer, EDS) 13
2.9 X光繞射儀(X-ray Diffractometer, XRD) 13
三、實驗結果與討論 14
3.1 不同面積大小的鎳矽多層膜之分析 14
3.1.1 自蔓延反應巨觀現象之觀察 14
3.1.2 自蔓延速率之分析 15
3.1.3 鎳矽多層膜的面積大小對自蔓延速率之影響 16
3.1.4 小結 18
3.2不同原子比例的鎳矽多層膜之分析 19
3.2.1 自蔓延速率之分析 19
3.2.2 利用TEM與XRD分析產物之相 22
3.2.3 鎳矽多層膜不穩定的自蔓延反應之探討 27
3.2.4 小結 29
3.3 不同氧化時間的鎳矽多層膜之分析 30
3.3.1 自蔓延速率之分析 30
3.3.2 氧化反應對自蔓延速率之影響 31
3.3.3 鎳矽多層膜的第二反應前沿與反應機制之探討 33
3.3.4 小結 36
3.4 鎳矽多層膜應用在基板上之研究 37
3.4.1 鎳矽多層膜應用在矽基板上之分析 37
3.4.2 鎳矽多層膜應用在環氧玻璃布層壓板上之分析 41
3.4.3 小結 42
四、結論與未來展望 43
五、參考文獻 44
1. T. P. Weihs, in Metallic Films for Electronic, Optical and Magnetic Applications, edited by K. Barmak and K. Coffey, 160-243 (Woodhead Publishing, 2014).
2. D. P. Adams, "Reactive multilayers fabricated by vapor deposition: A critical review", Thin Solid Films 576, 98-128 (2015).
3. A. S. Rogachev, S. G. Vadchenko, and A. S. Mukasyan, "Self-sustained waves of exothermic dissolution in reactive multilayer nano-foils", Applied Physics Letters 101 (6), 063119 (2012).
4. B. Bianca, J. Braeuer et al., "Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology", Journal of Micromechanics and Microengineering 20 (6), 064018 (2010).
5. X. Su et al., "Self-propagating high-temperature systhesis for compound thermoelectrics and new criterion for combustion processing", Nature Communications 5, 4908 (2014).
6. T. W. Barbee, R. L. Simpson, A. E. Gash, J. H. Satcher, "Nano-laminate-based ignitors", U. S. Patent 8, 328, 967 (2012).
7. J. N. Johnson, I. B. Schild, "Methods of making multilayered, hydrogen-containing thermite structures", U. S. Patent 7, 829,157 (2010).
8. L. A. Clevenger, C. V. Thompson, K. N. Tu, "Explosive silicidation in nickel/amorphous-silicon multilayer thin films", Journal of Applied Physics 67 (6), 2894-2898 (1990).
9. J. P. McDonald, V. C. Hodges, E. D. Jones, D. P. Adams, "Direct observation of spinlike reaction fronts in planar energetic multilayer foils", Applied Physics Letters 94 (3), 034102 (2009).
10. J. P. McDonald, R. V. Reeves, E. D. Jones, K. A. Chinn, D. P. Adams, "Effect of oxidation on reaction front instabilities and average propagation speed in Ni/Ti multilayer foils", Journal of Applied Physics 113 (10), 103505 (2013).
11. D. P. Adams, V. C. Hodges, M. M. Bai et al., "Exothermic reactions in Co/Al nanolaminates", Journal of Applied Physics 104 (4), 043502 (2008).
12. J. C. Trenkle, J. Wang, T. P. Weihs, T. C. Hufnagel, "Microstructural study of an oscillatory formation reaction in nanostructured reactive multilayer foils", Applied Physics Letters 87 (15), 153108 (2005).
13. M. Quirk and J. Serda, Semiconductor manufacturing technology. (2001).
14. J. Wang, J. Cai, Y.-H. Lin, C.-W. Nan, "Room-temperature ferromagnetism observed in Fe-doped NiO", Applied Physics Letters 87 (20), 202501 (2005).
15. G. M. Fritz, S. J. Spey, M. D. Grapes, T. P. Weihs, "Theresholds for igniting exothermic reactions in Al/Ni multilayers using pulses of electrical, mechanical, and thermal energy", Journal of Applied Physics 113 (1), 014901 (2013).
16. N. Amini-Manesh, S. Basu, R. Kumar, "Modeling of a reacting nanofilm on a composite substrate", Energy 36 (3), 1688-1697 (2011).
17. Y. N. Picard, J. P. McDonald, T. A. Friedmann et al., "Nanosecond laser induced ignition thresholds and reaction velocities of energetic bimetallic nanolaminates", Applied Physics Letters 93 (10), 104104 (2008).
18. R. D. Murphy, R. V. Reeves, C. D. Yarrington, D. P. Adams, "The dynamics of Al/Pt reactive multilayer ignition via pulsed-laser irradiation", Applied Physics Letters 107 (23), 234103 (2015).
19. R. V. Reeves, M. A. Rodriguez, E. D. Jones, D. P. Adams, "Condensed-Phase and Oxidation Reaction Behavior of Ti/2B Foils in Varied Gaseous Environments",The Journal of Physical Chemistry C 116 (33), 17904-17912 (2012).
20. R. V. Reeves, D. P. Adams, "Reaction instabilities in Co/Al nanolaminates due to chemical kinetics variation over micron-scales", Journal of Applied Physics 115 (4), 044911 (2014).
21. D. S. Rao, K. Muraleedharan, C. Humphreys, Microscopy: Science, Technology, Applications & Education. (Formatex, 2011).
22. J. I. Goldstein, D. E. Newbury, J. R. Michael, N. W. Ritchie, J. H. J. Scott, D.C. Joy, Scanning electron microscopy and X-ray microanalysis. (Springer, 2017).
23. 陳力俊, 材料電子顯微鏡學, 國家實驗研究院儀器科技研究中心, 293-298 (1994).
24. A. I. Ustinov and S. A. Demchenkov, "Influence of metastable Al9Ni2 phase on the sequence of phase transformations initiated by heating of Al/Ni multilayer foils produced by EBPVD method", Intermetallics 84, 82-91 (2017).
25. D. Connétable and O. Thomas, "First-principles study of nickel-silicides ordered phases", Journal of Alloys and Compounds 509 (6), 2639-2644 (2011).
26. J. Acker and K. Bohmhammel, "Optimization of thermodynamic data of the Ni-Si system", Thermochimica Acta 337, 187-193 (1999).
27. Z. Wen, Y. Zhao, H. Hou, L. Chen, " First-Principles Investigation of Mechanical and Thermodynamic Properties of Nickel Silicides at Finite Temperature", Physics of the Solid State 60 (5), 967-974 (2017).
28. R. Armstrong, "Models for Gasless Combustion in Layered Materials and Random Media", Combustion Science and Technology 71, 155-174 (1990).
29. F. d'Heurle, C. S. Petersson, J. E. E. Baglin, et al., "Formation of thin films of NiSi: Metastable structure, diffusion mechanisms in intermetallic compounds", Journal of Applied Physics 55 (12), 4208-4218 (1984).
30. E. Bahette, J. F. Michaud, D. Certon et al., "Progresses in cMUT device fabrication using low temperature processes", Journal of Micromechanics and Microengineering 24 (4), (2014).
31. S. Sen, M. Lake, P. Schaaf, "Experimental investigation of high temperature oxidation during self-propagating reaction in Zr/Al reactive multilayer films", Surface and Coatings Technology 340, 66-73 (2018).
32. Pradniak, Pradyot, Handbook of Inorganic Chemicals, McGraw-Hill Publications (2002).
33. W. H. Wang and W. K. Wang, "Amorphization phenomenon in Ni/amorphous Si multilayers", Journal of Materials Research 9 (02), 401-405 (1994).
34. R. B. Schwarz and W. L. Johnson, "Formation of an Amorphous Alloy by Solid-State Reaction of the Pure Polycrystalline Metals", Physical Review Letters 51 (5), 415-418 (1983).
35. F. Spaepen, "A structural model for the solid-liquid interface in monatomic systems", Acta Metallurgica 23 (6), 729-643 (1975).
36. W. H. Wang, H. Y. Bai et al., "Phase selection in interfacial reaction of Ni/amorphous Si multilayers", Journal of Applied Physics 73, 4313-4318 (1993).
37. W. H. Wang, H. Y. Bai et al., "Solid‐state amorphization reaction in polycrystalline Ni and amorphous Si multilayer", Journal of Applied Physics 73, 7217-7211 (1993).
38. Ł. Maj and J. Morgiel, "In-situ transmission electron microscopy observations of nucleation and growth of intermetallic phases during reaction of Ni(V)/Al multilayers", Thin Solid Films 621, 165-170 (2017).
39. A. S. Rogachev, S. G. Vadchenko et al., "Combustion in reactive multilayer Ni/Al nanofoils: Experiments and molecular dynamic simulation", Combustion and Flame 166, 158-169 (2016).
40. J. P. Holman, Heat Transfer, 145-146 (2010).
41. H. R. Shanks, P. D. Maycock, P. H. Sidles, G. C. Danielson, "Thermal Conductivity of silicon from 300 to 1400 K", Physical Review 130 (5), 1743-1748 (1963).
42. K. Azar, J. E. Graebner, "Experimental determination of thermal conductivity of printed wiring boards", Twelfth IEEE SEMI-THERM Symposium, 169-182 (1996).
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