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研究生:林立洋
研究生(外文):Li-Yang Lin
論文名稱:以大氣電漿製程製備黑色二氧化鈦薄膜及其特性分析
論文名稱(外文):Preparation and Characterization of Black Titanium Dioxide Films with Atmospheric Pressure Plasma Process
指導教授:陳弘穎陳弘穎引用關係
指導教授(外文):Hong-Ying Chen
口試委員:韓聖黃俊勇陳弘穎
口試委員(外文):Sheng HanChun-Yung HuangHong-Ying Chen
口試日期:2022-07-28
學位類別:碩士
校院名稱:國立高雄科技大學
系所名稱:化學工程與材料工程系
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2022
畢業學年度:110
語文別:中文
論文頁數:98
中文關鍵詞:黑色二氧化鈦大氣電漿光觸媒
外文關鍵詞:black TiO2atmospheric pressure plasmaphotocatalysis
相關次數:
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目錄
摘要 i
ABSTRACT ii
致謝 iii
目錄 iv
表目錄 viii
圖目錄 x
第1章 緒論 1
1.1光觸媒理論及應用 1
1.2二氧化鈦簡介 3
1.3亞氧化鈦(magneli phase)簡介 6
1.4塗佈技術 7
1.5電漿簡介及原理 9
1.6 海拉細胞(Hela cells)簡介 15
1.7研究動機與目的 16
第2章 文獻回顧 17
2.1製備黑色二氧化鈦 17
2.2製備黑色二氧化鈦的方法 17
2.2.1氫氣處理 17
2.2.2 氫化物還原 19
2.2.3金屬還原 20
2.2.4電化學還原 21
2.2.5氫電漿 21
第3章 實驗方法 23
3.1實驗流程 23
3.2薄膜製備方法 24
3.2.1前驅懸浮液配製 24
3.2.2基板前處理及旋轉塗佈 24
3.2.3大氣電漿製程 25
3.3 薄膜檢測分析 27
3.3.2 X光繞射儀分析儀(X-ray Diffractometer, XRD) 28
3.3.3場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscope, FE-SEM) 29
3.3.4霍爾效應量測儀 (Hall Effect Measurement System) 31
3.3.5 X光光電子能譜儀(X-ray Photoelectron Spectroscopy, XPS) 32
3.4 薄膜測試實驗 33
將電漿轟擊過後的試片,進行光降解亞甲基藍的實驗,觀察薄膜光降解能力。再進行海拉細胞貼附與生長測試,觀察其抗菌能力。 33
3.4.1光降解亞甲基藍實驗 33
3.4.2 海拉細胞貼附與生長測試 35
第4章 結果與討論 37
4.1電漿功率與轟擊距離對電漿溫度的影響 37
4.2表面顏色變化 43
4.3 X光繞射分析 47
4.3.1晶體結構的分析 47
4.3.2晶格常數的分析 51
4.4電子顯微鏡分析 56
4.4.1表面微結構分析 56
4.4.2橫截面微結構分析 62
4.5電性分析 64
4.6 X光光電能譜分析 66
4.7重量損失實驗 72
4.8 熱穩定性實驗 74
4.9光降解實驗 76
4.10 海拉細胞貼附與生長測試 77
4.11 本研究黑色二氧化鈦成因 78
4.11.1 二氧化鈦氧空位討論 78
4.11.2二氧化鈦Ti4+離子還原成Ti3+離子討論 78
第5章 結論 79
參考文獻 81


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