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研究生:韓同耀
研究生(外文):Han, Tong-Yao
論文名稱:以超快雷射製作石墨烯/二硫化鉬元件結構於氣體檢測
論文名稱(外文):Using Ultra-Fast Laser to Fabricate Graphene/MoS₂ Device Structures for Gas Detection
指導教授:張天立張天立引用關係
指導教授(外文):Chang, Tien-Li
口試委員:王建評李亞偉林鼎晸張天立
口試委員(外文):Wang, Chien-PingLee, Ya-WeiLin, Ding-ZhengChang, Tien-Li
口試日期:2021-07-09
學位類別:碩士
校院名稱:國立臺灣師範大學
系所名稱:機電工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2021
畢業學年度:109
語文別:中文
論文頁數:130
中文關鍵詞:超快雷射石墨烯加熱感測元件氣體感測二硫化鉬
外文關鍵詞:Ultrafast laser processing techniqueGrapheneMoS₂Heating sensing deviceGas detection
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第一章 緒論 1
1.1 研究背景與目的 1
1.2 氣體感測器概述 2
1.3 氣體感測器的原理及分類 3
1.4 雷射製程技術簡介 4
1.5 二維材料 5
1.6 導電材料 7
1.7 微加熱元件概述 7
第二章 文獻回顧 14
2.1 超快雷射加工機簡介 14
2.2 超快雷射製程回顧 14
2.3 氣體感測器應用回顧 16
2.4 石墨烯材料回顧 18
2.4.1 石墨烯性質 18
2.4.2 石墨烯熱元件 19
2.5 石墨烯結構與氣體反應原理 20
2.6 硫化鉬金屬氧化物 21
2.6.1 MoS2的晶體結構與基本性質 21
2.6.2 硫化鉬金屬氧化物氣體偵測 22
2.6.3 二硫化鉬基氣敏感測器研究現狀 22
2.7 微加熱元件研究情況 25
第三章 研究方法與設計 40
3.1 研究方法 40
3.2 石墨烯導電薄膜製作 40
3.3 超快雷射製程製造 41
3.3.1 雷射加工剝離閥值 42
3.3.2 雷射加工之重疊率與脈衝數 43
3.4 加熱元件設計 44
3.4.1 石墨烯薄膜微加熱器 44
3.4.2 石墨烯微加熱器結構設計與材料選擇 45
3.5 微型加熱氣體感測元件設計與製作 46
3.6 氣體感測器腔體製作 47
3.7 MOS₂/石墨烯薄膜製作 47
3.8 氣體感測晶片檢測分析 48
3.9 傳熱理論 48
3.9.1 熱傳導 49
3.9.2對流熱傳遞 50
3.9.3 熱輻射 51
3.10電熱耦合關係 52
3.11 有限元理論 55
3.12 實驗量測與設備 58
第四章 研究結果與討論 68
4.1 石墨烯薄膜分析 68
4.1.1 旋轉塗佈石墨烯表面形貌分析 68
4.1.2 石墨烯薄膜表面分析及特性分析 69
4.2 加熱電極結構設計 69
4.3 石墨烯基微加熱器焦耳熱模擬分析 74
4.3.1 焦耳熱模擬前處理 75
4.3.2 COMSOL的建模步驟 75
4.3.3 物理模型的建置和材料參數設定 75
4.3.4 物理條件的設定 76
4.3.5 網格劃分 76
4.3.6 工作條件設定與模擬計算 77
4.3.7 模擬結果分析與討論 78
4.4 超快雷射於導電薄膜圖案化之結果 82
4.4.1雷射加工剝離閥值 83
4.4.2 微型加熱感測元件製作 84
4.5 微型加熱感測元件之電壓與溫度變化關係 84
4.5.1微型加熱感測元件consol模擬分析 84
4.5.2微型加熱感測元件實際施加電壓與溫度變化關係 85
4.6 MOS/石墨烯元件氣體感測分析 86
4.6.1 MoS氣敏機理研究 86
4.6.2 MoS2敏感膜氣敏機理分析 87
4.7 電性與氣體反應檢測分析 87
4.7.1 石墨烯加熱感測元件與加熱溫度之關係 87
4.7.2 MoS2/石墨烯加熱感測元件與加熱溫度之關係 89
第五章 結論 117
5.1 結論 117
5.2 建議與未來展望 119
參考文獻 120
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