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論文名稱(外文):Research and Analysis on Preparation of Lead-Free Solder Alloy Nanowires by Hydraulic Vacuum Injection Method
外文關鍵詞:lead-free solderanodic aluminum oxidevacuum hydraulic Mold
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一維奈米結構材研究與日俱增,許多不同製造奈米線的方法已被研究開發,但常受限於製程繁瑣以及儀器設備昂貴,且製程時間甚長,相對地使量產與成本上受到了限制,本研究提供了一便利且完整製作合金奈米線的方法,包括真空腔體的設計、氧化鋁奈米模板的製作與奈米線真空壓鑄方法等,利用本篇論文的製作方法可以以簡單、快速、穩定且低成本的方式製造出高密度的奈米線。隨著科技業的發展,精密電子元件的焊接需要尺寸更小的焊接材料,將奈米技術應用於電子封裝可被視為微電子技術中的一種可能方法,其中,無鉛焊錫例如Sn - 3.0 wt.%Ag - 0.5 wt. %Cu (SAC305)合金具有良好的潤濕性與機械性質,是微電子設備中連接的常用焊料,本研究利用草酸對5N(99.999%)純鋁進行陽極處理,製作出孔徑約為80 nm、厚度為100 μm、孔密度為1010 孔/cm2 的陽極氧化鋁模板,並透過真空壓鑄法將無鉛焊錫合金熔液壓鑄至具有奈米管結構的陽極氧化鋁模板內,待熔液凝固後可形成無鉛焊錫合金奈米線,透過SEM觀察製作出之無鉛焊錫合金奈米線填充率皆可達90%以上,而持壓時間及製程溫度將影響合金奈米線的型態,透過EDS確認壓鑄前後SAC305塊材、奈米線陣列的元素化合比均保持固定,並擁有相近的元素分佈,且未有其他元素混入奈米線內。
One-dimensional nano-structure materials for example, nanowires are interesting in the research and is increasing day by day. The manufacturing methods and processes of nanowires have been developed, however, the high cost and complex processes has relatively affected mass production. In order to develop an efficient process to fabricate nanowires, this research provides a convenient method of making alloy nanowires, the method including designed of vacuum chambers, fabricated nano-template of anodic aluminum oxide, and nanowires formation by the vacuum hydraulic injection process. There are advantages of fast mass production, low cost, and high quality of nanowires formation by injection metal melt into nana-template. The applications of nanotechnology to electronic packaging can be regarded as a possible method in microelectronics technology. Among them, lead-free solder such as Sn-3.0 wt .%Ag-0.5 wt. %Cu (SAC305) alloy has good wettability and mechanical properties which solder is always required using for connection in microelectronic devices. In this theses, first, an anodic aluminum oxide templates with pore diameter of 80 nm, film thickness of 100 μm, and pore density of 1010 pore/cm2 were fabricated by anodization process on a pure aluminum sheet. Second, lead-free solder alloy melt was injected in the nano-template and then solidified to lead-free solder alloy nanowires. The nanowires microstructure and composition were observer and detected by SEM and EDS.
致 謝 I
摘 要 II
Abstract III
目 錄 IV
表目錄 VII
圖目錄 VIII
第一章 前言 1
第二章 文獻回顧 4
2-1無鉛銲錫合金發展 4
2-1-2無鉛銲錫之性質特性需求 5
2-1-3 常用無鉛銲錫之種類 10
2-2 奈米材料 16
2-2-1 奈米線的製備 17
2-3陽極氧化鋁(AAO) 28
2-3-1 陽極氧化鋁之成長條件 30

第三章 實驗方法 37
3-1 陽極氧化鋁奈米模板製作 37
3-2 真空壓鑄法製作無鉛銲錫合金奈米線 40
3-3 SAC305合金奈米線量測與分析 42
3-3-1 掃描式電子顯微鏡 42
3-3-2 能量散射光譜儀 43
第四章 結果與討論 44
4-1電解拋光及陽極氧化鋁模具設計與製作 44
4-2 5N純鋁電解拋光 49
4-3 陽極處理反應槽系統設計設計與製作 52
4-4 陽極氧化鋁奈米模板顯微結構 55
4-5 真空壓鑄腔體設計與製作 60
4-6合金奈米線之成形機制 65
4-7 合金奈米線提取 72
4-8量測與分析 74
4-8-1 SCA305塊材成份分析 74
4-8-2 奈米線成份分析 77
第五章 結論與未來展望 78
5-1 結論 78
5-2 未來展望 79
參考文獻 80

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