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While the rapid rise of semiconductor and package testing industries, the emission of volatile organic compounds (VOC) has also increased sharply. Besides the effect of VOC on the environment, derived pollutants have also caused an increasing burden and pollution, and it may affect our daily life.
Since the issue of environmental protection continues heating up in the whole world including Taiwan, the study was focused on the working VOC pollution prevention which complying the operation of air pollution control devices and fitting the emission standards of semiconductor industry. Further, the energy-saving research was also calculated in order to reduce the cost at the same time.
The “rotor system + incineration treatment”, which is a system commonly used for VOC control in the semiconductor industry, operation optimization is important to maintain system stability and meet the regulations.
With the combination of different parameters, such as air volume, VOC concentration, temperature, concentration ratio, power consumption, the study tried to confirm the mutual influence of each parameter. Increasing the operating concentration ratio of the system and reducing air desorption will decrease the electric energy for heating, besides, rising the VOC concentration at the RTO entrance to increase the heat of combustion and reduce the electric will also maintain the furnace temperature, both can lead to the benefit of energy-saving.
There are some suggestions for the Zeolite Rotor system in this study. First, reduce the high-boiling VOCs into Zeolite Rotor system will prevent the accumulation of high-boiling VOCs to result in system shutting down for washing and maintenance and also reduce the abnormal operation of the furnace heat recovery regenerative bricks of Regenerative Thermal Oxidizer (RTO). The benefits of preventing high-boiling VOCs into the system are decreasing the frequency of changing heat recovery regenerative bricks, decreasing the maintenance fee and decreasing the industrial safety risk.
The study showed that the average inlet concentration of VOC is 66.5 ppm, the maximum allowable concentration of the zeolite runner is 10 times, and the outlet temperature of the zeolite rotor should be greater than 40 °C to ensure the stable operation of the zeolite rotor without the problem of VOC penetration. The maximum allowable concentration ratio of RTO furnace is 8.58 times, which is 10 times lower than the concentration ratio of zeolite rotor operation. The RTO equipment can be modified to increase the allowable concentration ratio to save operating energy consumption. The average concentration ratio is increased by 1 time, which can save operating costs NT309 ,721.
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