臺灣博碩士論文加值系統

在本篇論文中，我們以金屬光柵作為基礎結構，激發其表面電漿極化子(surface plasmon polariton, SPP)並提升特定偏振方向的電場強度來強化單層二硫化鉬(molybdenum disulfide, "MoS2" )的光致發光(Photoluminescence, PL)，在量測結果中可以得到最大4.2倍的增強。接著，我們提出孔洞型金屬光柵作為進階結構，形成額外的侷限性表面電漿共振(localized surface plasmon resonance, LSPR)，其優勢為能夠善用另一個偏振方向的電場，以及增加電場的分布面積，在量測結果中可以得到最大9.3倍的增強。
我們將結構的共振波長全部設計在二硫化鉬的激子(exciton)模態，因此激發光源不會被限制在單一波長，而能夠使用多種雷射來激發正是我們元件的特色。另外，我們將結構包覆於聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)這種彈性材料中，而我們的元件在拉伸測試中PL訊號的波峰位置和強度都能保持不變，未來能應用在需要高穩定度的可饒式元件中。

In this thesis, we use the metal grating as the basic structure, which can form the surface plasmon polariton (SPP) and then increase the intensity of a polarized E-field, to enhance the photoluminescence (PL) intensity of single-layer MoS2 about 4.2 times. Then, we propose the metal grating with holes, which can form additional Localized Surface Plasmon Resonance (LSPR) to utilize another polarized E-field and increase the area of all E-field, to enhance the PL intensity about 9.3 times.
The resonant wavelength of our structures is only designed for the exciton mode of MoS2, so the excitation light source would not be limited at a single wavelength. In other words, a feature of our device is that various kinds of laser can excite our structures. In addition, we encapsulate our structure in Polydimethylsiloxane (PDMS), a flexible material, and even under an uniaxial tensile strain, they still provide a stable PL enhancement. We look forward to applying our research to future applications where high stability is required in the field of flexible device.

中文摘要 i
Abstract ii
致謝 iii
目錄 v
圖片清單 viii
表格清單 xi
第一章 序論 1
1.1 背景及簡介 1
1.1.1 二維材料及二硫化鉬("MoS2" ) 1
1.1.2 表面電漿子 5
1.1.3 彈性基板 7
1.2 研究動機與論文架構概述 9
1.2.1 增強二硫化鉬PL的動機及方法 9
1.2.2 表面電漿增強機制以及結合彈性基板 11
1.2.3 元件結構簡介及論文架構 14
第二章 模擬、製程和量測 15
2.1 模擬方法 15
2.1.1 有限元素分析法 15
2.1.2 電磁波模組 16
2.2 製程步驟 19
2.2.1電子束微影 21
2.2.2金屬熱蒸鍍與掀離(lift off) 23
2.2.3 PDMS基板結合 24
2.2.4二維材料轉印 25
2.3量測系統 26
2.3.1 穿透頻譜量測系統 26
2.3.2 拉曼與光致發光量測系統 27
第三章 結構設計與光學特性分析 29
3.1 金屬光柵(metal grating, MG)設計 29
3.1.1 初估週期及調變金屬光柵厚度 31
3.1.2 調變金屬光柵週期與調變金屬寬度 35
3.2 金屬鏤空光柵(metal grating with holes, MGH)設計 37
3.2.1 調變孔洞週期與x方向偏振電場 37
3.2.2 調變孔洞週期與y方向偏振電場 41
3.3 小結 44
第四章 實驗與結果分析 45
4.1 二硫化鉬特性 45
4.2 以金屬光柵結構增強MoS2光致發光 48
4.2.1 確認金屬光柵的共振波長趨勢 48
4.2.2 PL量測以及調變光柵週期 51
4.2.3 更換PL激發光源 52
4.3 以金屬鏤空光柵結構增強MoS2光致發光 54
4.3.1 調變孔洞週期 54
4.3.2 增加孔洞前後之MoS2光致發光強化幅度討論 55
4.4 拉伸穩定性 57
第五章 結論與未來展望 60
5.1 結論 60
5.2未來展望 60
參考文獻 61

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