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研究生:項文玲
研究生(外文):Hsiang, Wen-Ling
論文名稱:表面改質多晶矽奈米線元件對丙酮氣體之感測探討
論文名稱(外文):The Study of Acetone Sensitivity Based on Surface Modified Poly-Si Nanowires FETs
指導教授:陳皇銘
指導教授(外文):Chung, Hui-Min
口試委員:劉柏村楊裕雄陳皇銘
學位類別:碩士
校院名稱:國立陽明交通大學
系所名稱:生醫工程研究所
學門:工程學門
學類:生醫工程學類
論文種類:學術論文
論文出版年:2021
畢業學年度:110
語文別:中文
論文頁數:58
中文關鍵詞:多晶矽奈米線電晶體丙酮氣體感測表面修飾酞菁材料含氰基材料
外文關鍵詞:Acetone gas sensingPoly-Si NanowiresSurface ModificationPhthalocyanineCyano-containing materialTCNQ
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本研究探討多晶矽奈米線電晶體對丙酮氣體的感測能力,以電流比值作為判斷感測能力的依據。實驗分別修飾酞菁材料以及含氰基材料於多晶矽奈米線的表面,透過材料上的官能基對丙酮氣體分子的化學吸引力來改善感測能力。除此之外,本實驗也將多晶矽奈米線元件置於不同相對濕度下對丙酮氣體進行感測,以確認丙酮氣體分子和水氣的競爭關係。最後,實驗結果證實,元件表面修飾含氰基之材料可有效提升感測能力,在相對溼度60%下,針對3.4 ppm的丙酮氣體其電性提升約32.7 %。因此,非常適合應用於生醫上糖尿病患者呼氣的丙酮氣體檢測。
Evaluation of acetone gas sensing ability based on poly-Si nanowires field-effect transistor was the main focus of this thesis. The sensing ability is defined by measured current ratio. It can be improved by the chemical attraction between acetone molecules and specific functional groups of the modified organic materials which prepared either by thermal evaporation or spin coating methods on top of the poly-Si nanowires field-effect transistors. In order to verify the competitive relationship between acetone molecules and water molecules, gas sensing abilities were measured under different relative humidity (RH) circumstances. Finally, the experimental results suggested that the current ratio of cyano-containing material increased 32.7 % with 3.4 ppm acetone gas at RH 60%. The result indicated that the compound containing cyano-functional group can be greatly improved the device’s acetone gas sensing ability.
摘 要 i
ABSTRACT ii
致謝 iii
目錄 iv
圖目錄 vii
表目錄 ix
第 1 章、 序論 1
1.1 研究背景 1
1.2 氣體感測 2
1.2.1 氣體感測的臨床醫學研究 2
1.2.2 丙酮氣體檢測糖尿病的條件 4
1.2.3 各類型氣體感測器 5
1.3 表面修飾 7
1.3.1 表面修飾之影響 7
1.3.2 修飾層材料 7
1.4 研究動機與目標 9
1.5 論文架構 9
第 2 章、 實驗製程與設備 10
2.1 多晶矽奈米線場效電晶體(Poly-Si Nanowires Field Effect Transistors) 10
2.2 多晶矽奈米線場效電晶體元件製作流程 11
2.3 多晶矽奈米線場效電晶體表面修飾 14
2.3.1 元件表面清洗 14
2.3.2 元件表面修飾 14
2.4 實驗儀器及原理 16
2.4.1 超音波震盪器(Ultrasonic cleaner) 16
2.4.2 氧氣電漿清洗機(Oxygen plasma cleaner) 16
2.4.3 旋轉塗佈機(Spin coater) 16
2.4.4 熱蒸鍍機(Thermal coater) 17
2.4.5 加熱器(Hot plate) 17
2.4.6 Keithley 2636 IV Analyzer 18
2.4.7 原子力顯微鏡(Atomic Force Microscope, AFM) 18
2.5 氣體感測系統 19
2.5.1 感測系統 19
2.5.2 丙酮氣體感測的量測流程 20
2.5.3 丙酮氣體的濃度控制 21
第 3 章、 實驗原理與機制 23
3.1 多晶矽奈米線場效電晶體的工作原理 23
3.2 場效電晶體的重要參數 24
3.2.1 臨界電壓(Threshold voltage, VTH) 24
3.2.2 次臨界擺幅(Subthershold Swing, S.S.) 26
3.2.3 電流開關比(On/Off ratio) 26
3.2.4 轉導值(Transconductance, gm) 27
3.2.5 載子遷移率(mobility, μ) 27
3.3 氣體感測能力量化 28
3.4 多晶矽奈米線場效電晶體對丙酮氣體的感測機制 28
第 4 章、 實驗結果與討論 29
4.1 引言 29
4.2 表面修飾參數 29
4.2.1 表面修飾層的厚度 29
4.2.2 修飾層對於奈米線元件的影響 31
4.3 丙酮氣體感測實驗參數 33
4.3.1 多晶矽奈米線元件之感測實驗參數 33
4.3.2 TCNQ修飾層元件之感測實驗參數 36
4.3.3 CuPc修飾層元件之感測實驗參數 39
4.3.4 FePc修飾層元件之感測實驗參數 42
4.4 多晶矽奈米線元件對丙酮氣體感測能力之比較與討論 45
4.4.1 一般元件對丙酮氣體的感測機制與討論 45
4.4.2 修飾元件對丙酮氣體的感測機制與討論 46
4.5 相對濕度對多晶矽奈米線場效電晶體的電性之影響 50
4.5.1 水氣對一般元件的影響 51
4.5.2 水氣對修飾元件的影響 51
第 5 章、 結論與未來展望 52
5.1 總結 52
5.2 未來發展 53
參考文獻 54
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