臺灣博碩士論文加值系統

摘要 i
ABSTRACT ii
致謝 iii
目錄 iv
表目錄 vi
圖目錄 x
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 研究背景與動機 8
第二章 潔淨室之分類 9
2.1 潔淨室規範 9
2.2 潔淨室分類 13
2.2.1 亂流式(傳統式) (Non Unidirectional Airflow Cleanroom) 13
2.2.2 垂直層流式(Vertical Laminar Flow Cleanroom) 14
2.2.3 水平層流式(Horizontal Laminar Flow Cleanroom) 15
2.3 FFU和Cheese Slab簡介 16
第三章 研究方法 18
3.1 數值分析 19
3.2 基本假設 19
3.3 研究步驟流程圖 20
3.4 統御方程式 22
3.4.1 紊流傳輸模式 23
3.4.2 鬆弛因子 25
3.5 離散化方法 26
3.6 空氣年齡 29
3.7 邊界條件 30
3.8 網格設定及收斂條件設定 32
3.9 重疊網格 35
第四章 結果與討論 36
4.1 不同Partition開孔大小之效益分析 37
4.1.1 Partition開孔下層氣流分析 41
4.1.2 Partition開孔中層氣流分析 46
4.1.3 Partition開孔上層氣流分析 49
4.1.4 小結 52
4.2 不同排列下Cheese Slab之效益分析 55
4.2.1 Cheese Slab第一層分析 60
4.2.2 Cheese Slab第二層分析 70
4.2.3 Cheese Slab第三層分析 77
4.2.4 Cheese Slab第四層分析 83
4.2.5 Cheese Slab第五層分析 89
4.2.6 小結 95
4.3 改變風速及風向對稼動中Robot之動態模擬分析 98
4.3.1 固定風向下改變風速對於稼動中Robot之影響 101
4.3.2 固定風速下改變風向對於稼動中Robot之影響 106
4.3.3 小結 115
第五章 結論與建議 120
5.1 結論 120
5.2 未來建議 121
文獻回顧 122
符號彙編 126
縮寫表彙編 127

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