臺灣博碩士論文加值系統

中文提要
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Abstract ii
目錄
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圖目錄
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表目錄
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1 第一章、緒論 1
1-1 嵌段共聚物之自組裝機制 1
1-2 塊材系統之自組裝 2
1-3 薄膜系統之自組裝 4
1-3-1 表面場作用力對薄膜型態影響 5
1-3-2 膜厚相稱性與梯田結構 6
1-4 空間侷限效應 8
1-4-1 表面偏析 (Surface segregation) 9
1-4-2 缺陷偏析 (Defect segregation) 11
1-4-3 堆積挫折 (Packing frustration) 12
1-5 混摻效應 14
1-6 分子量效應 17
1-7 研究動機 19
2 第二章、實驗 21
2-1 實驗材料 21
2-1-1 高分子材料 21
2-2 實驗儀器 22
2-3 實驗製備與設計 23
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2-3-1 矽晶圓基材之前處理矽晶圓基材之前處理........................................................................................................................................................................ 23
2-3-2 高分子薄膜製備高分子薄膜製備........................................................................................................................................................................................ 23
2-3-3 氧氣離子電漿蝕刻氧氣離子電漿蝕刻—薄膜表面潤濕層之移除方法薄膜表面潤濕層之移除方法........................................................................ 24
2-4 儀器原理儀器原理 ...................................................................................................................................................................................................................................... 25
2-4-1 光學顯微鏡光學顯微鏡(OM) .................................................................................................................................................................................... 25
2-4-2 原子力顯微鏡原子力顯微鏡(AFM) ........................................................................................................................................................................ 26
2-4-3 掃描式電子顯微鏡掃描式電子顯微鏡(SEM).......................................................................................................................................................... 27
2-4-4 薄膜分析儀薄膜分析儀(Filmetrics F20) .................................................................................................................................................. 29
2-4-5 低掠角小角度低掠角小角度X光散射儀光散射儀(GISAXS).................................................................................................................... 30
2-5 不同入射角之小角度不同入射角之小角度X光散射光散射 ............................................................................................................................................................ 38
3 第三章、結果與討論第三章、結果與討論 .................................................................................................................................................................................................................... 40
3-1 臨場實驗臨場實驗(in situ)在不同厚度下結果在不同厚度下結果 ............................................................................................................................................ 40
3-1-1 GISAXS 2-D圖之特徵介紹圖之特徵介紹 .................................................................................................................................................... 42
3-1-2 初始厚度為初始厚度為290 nm的臨場實驗的臨場實驗(in situ)結果結果 .......................................................................................... 44
3-1-3 初始厚度為初始厚度為90 nm的臨場的臨場實驗實驗(in situ)結果結果 .............................................................................................. 49
3-2 水平圓柱之間距結構探討水平圓柱之間距結構探討 .............................................................................................................................................................................. 54
3-2-1 布拉格繞射之晶格結構分析布拉格繞射之晶格結構分析................................................................................................................................................ 55
3-2-2 分子量效應分子量效應........................................................................................................................................................................................................ 59
3-3 不同入射角之結構探討不同入射角之結構探討(Angle-dependence) .................................................................................................................... 63
3-3-1 薄膜表面型態薄膜表面型態................................................................................................................................................................................................ 63
3-3-2 不同組成之薄膜不同組成之薄膜........................................................................................................................................................................................ 70
3-3-3 利用擬合數據討論分子量對不同組成之梯田結構的影響利用擬合數據討論分子量對不同組成之梯田結構的影響................................................ 76
4 第四章、結論第四章、結論 ............................................................................................................................................................................................................................................ 86
5 第五章、參考文獻第五章、參考文獻 ............................................................................................................................................................................................................................ 88
6 第六章、附錄第六章、附錄 ............................................................................................................................................................................................................................................ 94

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