臺灣博碩士論文加值系統

本研究利用三個靶材共鍍的磁控濺鍍系統，藉由改變類金屬元素矽及稀土元素釹的成分比例，成功製備一系列的(CoCrNi)100–x–ySixNdy 中熵合金薄膜。第一部分是固定矽元素的含量在大約 0.7 at.%，改變釹元素的含量。隨著釹元素的添加量增加，可以在 X 光繞射儀及穿透式電子顯微鏡選區繞射的圖譜中觀察到材料的結構從單一的 FCC 相逐漸轉變為 FCC CoCrNi 相、HCP CoCrNi 相及 HCP NdNi5 相共同存在，且可以在掃描式電子顯微鏡及穿透式電子顯微鏡的圖片中觀察到細化的柱狀晶結構。在 Si0.58Nd5.14 的薄膜中，因為固溶強化、晶粒細化以及析出強化的效果，材料的硬度及壓縮降伏強度會分別到達 10.29 及 4.27 GPa 的最大值。第二部分是固定釹元素的含量在大約 2.6 at.%，改變矽元素的含量。隨著矽元素的添加量增加，可以在 X 光繞射儀及穿透式電子顯微鏡選區繞射的圖譜中觀察到材料的結構從完全的結晶相逐漸轉變為結晶相被包圍在非晶相中，且可以在掃描式電子顯微鏡及穿透式電子顯微鏡的圖片中觀察到柱狀晶結構消失。在Si0.76Nd2.91 的薄膜中，因為間隙型固溶強化的效果，材料的硬度及壓縮降伏強度會分別些微提升至9.75 及 4.10 GPa 的最大值。將兩部分的(CoCrNi)100–x–ySixNdy 中熵合金薄膜進行綜合討論，發現在Si0.58Nd5.14 的薄膜中具有最佳化的機械性質，表示析出強化及晶粒細化可以成為(CoCrNi)100–x–ySixNdy 中熵合金薄膜中主要的強化機制。

A series of (CoCrNi)100–x–ySixNdy medium entropy alloy films (MEAFs) with manipulated metalloid element, Si, and rare earth element, Nd, was synthesized using magnetron three-target co-sputtering. A transformation from single FCC CoCrNi phase to the coexistence of FCC CoCrNi, HCP CoCrNi and HCP NdNi5 phases was observed in X-ray diffraction (XRD) and transmission electron microscopy (TEM) diffraction patterns with the increasing Nd content for Si content of ~0.7 at.%, and the scanning electron microscope (SEM) and TEM images presented the refined columnar grains. The hardness and compressive yield strength reached the maxima of 10.29 and 4.27 GPa, respectively, in Si0.58Nd5.14 film owing to the solid solution strengthening, grain refinement and precipitation strengthening. The films exhibited a transition from fully crystalline to crystalline within the amorphous matrix in XRD and TEM results with the increasing Si content for Nd content of ~2.6 at.%, and the columnar structure disappeared in the SEM and TEM images. The hardness and yield strength increased slightly to the maxima of 9.75 and 4.10 GPa, respectively, in Si0.76Nd2.91 film attributed mainly to the interstitial solid solution strengthening. Comprehensive discussion of (CoCrNi)100–x–ySixNdy MEAFs showed the optimized mechanical properties in Si0.58Nd5.14 film, indicating the precipitation strengthening and grain refinement strengthening would be the major strengthening mechanisms in this system.

口試委員審定書 #
誌謝 i
中文摘要 iii
Abstract iv
CONTENTS v
LIST OF FIGURES viii
LIST OF TABLES xv
Chapter 1 Introduction 1
Chapter 2 Literature Review 4
2.1 High Entropy Alloys (HEAs) 4
2.1.1 Definition 5
2.1.2 Four Core Effects 6
2.1.3 CoCrFeMnNi HEAs 11
2.2 CoCrNi MEAs and CoCrNi MEAFs 15
2.2.1 CoCrNi MEAs 15
2.2.2 Magnetron Sputtering Deposition 19
2.2.3 CoCrNi MEAFs 21
2.3 Effect of Rare Earth Element Addition 23
2.3.1 Gd Addition in HEAs 24
2.3.2 Nd Addition in HEAs 26
2.3.3 Y Addition in HEAFs 28
2.3.4 Ce Addition in MEAFs 30
2.4 Effect of Non-metallic Element and Metalloid Element Addition 31
2.4.1 Si Addition in MEAs 32
2.4.2 B Addition in HEAs 33
2.4.3 C Addition in HEAs 35
Chapter 3 Experimental Procedures 37
3.1 Experimental Flow 37
3.2 Sample Preparations and Deposition Process 37
3.2.1 (CoCrNi)100–a–ySiaNdy MEAFs 37
3.2.2 (CoCrNi)100–x–bSixNdb MEAFs 38
3.3 Analytical Techniques 39
3.3.1 Electron Probe X-ray Microanalyzer (EPMA) 39
3.3.2 X-ray Diffraction (XRD) 40
3.3.3 Scanning Electron Microscope (SEM) 40
3.3.4 Transmission Electron Microscope (TEM) 40
3.3.5 Nanoindentation 41
3.3.6 Micropillar Compression Test 41
Chapter 4 Results and Discussion 42
4.1 (CoCrNi)100–a–ySiaNdy MEAFs 42
4.1.1 Chemical Composition 42
4.1.2 XRD Results 43
4.1.3 SEM Observation 47
4.1.4 TEM Observation 49
4.1.5 Nanoindentation 57
4.1.6 Micropillar Compression test 60
4.2 (CoCrNi)100–x–bSixNdb MEAFs 63
4.2.1 Chemical Composition 63
4.2.2 XRD Results 64
4.2.3 SEM Observation 66
4.2.4 TEM Observation 67
4.2.5 Nanoindentation 77
4.2.6 Micropillar Compression test 79
4.3 Comparison between (CoCrNi)100–a–ySiaNdy and (CoCrNi)100–x–bSixNdb MEAFs 82
Chapter 5 Conclusions 85
References 87

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