臺灣博碩士論文加值系統

本論文研究採用斜向沉積銀薄膜於聚鄰苯二甲酸二烯丙酯（PDAP）製成的聚合物光柵上，形成奈米分裂管陣列，作為一個超穎表面。在垂直入射時，特定波長處的TM 偏振呈現高反射帶，產生TM偏振的反射峰現象是由於被銀所包覆的光柵背脊內部的局部磁場增強所導致。為了理解金屬包覆於超穎表面上的傳播情況，採用有限差分時域（FDTD）方法來分析經由光柵上方的偶極子源激發出的TM模式與TE模式的表面波傳播，藉由超穎表面上的相關等頻率曲線揭示了表面電漿波的傳播特性，並發現其平面內的各向異性特性取決於波長與銀的形貌而變化。在 TM 反射峰附近的波長範圍內，等頻率曲線對垂直於光柵的波向量的依賴性較低，展現出表面電漿無繞射的傳播特性。另一方面，金屬包覆超穎表面支持遠距離傳播特性。本研究還探討了近場磁場對表面電漿性質的作用。

In this work, a polymer grating made of poly(diallyl phthalate) (PDAP) was obliquely deposited with silver to be a split nanotube array as a metasurface to exhibit a TM polarized high reflectance band. The TM-polarized reflection peak is due to the localized magnetic field enhancement within the ridge surrounding by coated silver. In order to understand the propagation on the metal coated metasurface. The finite-difference time-domain (FDTD) method is adopted to analyze the propagation of TM mode and TE mode surface waves from a dipole source above the grating. The associated iso-frequency curve on the surface reveals the propagation property of surface plasmon wave. The in-plane anisotropic property is found to be dependent on wavelength and the morphology of coated silver. At wavelengths around the TM reflection peak, the iso-frequency curve is low dependent on the wave vector component perpendicular to the gratings to show diffractionless propagation of surface plasmon. On the other hand, the metal coated metasurface supports long range propagation. The role of near field magnetic field on the surface plasmon property is also investigated in this study.

摘要 i
ABSTRACT ii
誌謝 iii
目錄 iv
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 超穎材料介紹 1
1.2 雙曲超穎材料 1
1.2.1 雙曲超穎材料實際應用 1
1.3 超穎材料的傳播損耗問題 2
1.4 雙曲超穎表面 2
1.5 表面電漿共振 5
1.6 近期超穎表面的發展 6
1.6.1 奈米結構凡得瓦力材料之中紅外雙曲超穎表面 6
1.6.2 混和脊寬金屬光柵之超穎表面 7
1.6.3 金屬奈米線陣列之超穎表面 8
1.7 TM與TE傳播表面電漿共振波 9
1.8 研究動機 10
第二章 原理 12
2.1 斜向沉積技術 12
2.2 薄膜生長理論 13
2.3 表面電漿場 14
2.4 傅立葉轉換 19
2.5 時域有限差分法 20
第三章 實驗製程與量測介紹 21
3.1 真空鍍膜系統 21
3.1.1 抽真空系統 21
3.1.2 電子束蒸鍍系統 22
3.1.3 載台旋轉系統 22
3.1.4 石英膜厚監控系統 22
3.2 基板準備與實驗流程 22
3.2.1 奈米壓印光柵基板 22
3.2.2 實驗流程 23
3.2.3 HITACHI UH-4150商用光譜儀 24
3.2.4 高解析熱場發射掃描式電子顯微鏡 24
3.3 模擬軟體 24
第四章 實驗結果與討論 25
4.1 光柵基板幾何參數 25
4.2 以斜向沉積50°鍍製銀奈米分裂管 26
4.3 交錯式斜向沉積50°鍍製銀奈米分裂管 27
4.4 銀奈米分裂管之光學特性研究 28
4.4.1 單層銀奈米分裂管光學特性研究 29
4.4.2 雙層銀奈米分裂管光學特性研究 30
4.5 反磁共振現象 31
4.6 銀奈米分裂管超穎表面之光學特性分析 34
4.6.1 超穎表面之表面電漿共振傳播 34
4.6.2 超穎表面之橫截面電磁場分析 36
4.7 等頻率曲線的繪製與分析 37
4.8 隨波長電場分布波前與等頻率曲線的分析 39
4.8.1 隨波長TM模式下電場分布波前與等頻率曲線變化 39
4.8.2 隨波長TE模式下電場分布波前與等頻率曲線變化 43
4.9 TM與TE模式遠距離傳播表面電漿分析 47
4.9.1 TM模式下隨波長橫截面電場分析 47
4.9.2 TE模式下隨波長橫截面電場分析 48
4.9.3 TM與TE模式下隨波長表面電場分布比較 49
第五章 結論 51
參考文獻 52

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