臺灣博碩士論文加值系統

二維（2D）材料的原子層厚度使其能夠與氣體分子有效地相互作用，促進這些材料內部的電荷轉移，並使氣體分子在其表面上快速吸附與脫附。石墨烯和過渡金屬二硫化物具有高比表面積與體積比、低噪聲水平和對周圍環境變化敏感的電子性質的2D材料，因此是具有潛力的偵測器元件。在這裡，我們使用了化學氣相沉積法（CVD）生長MoS2並將其堆疊在石墨烯上，以此設計了一種丙酮氣體偵測器，並以該偵測器量測其在不同濃度的丙酮響應度以及響應回復時間，以此做為對比去比較沒有混合二硫化鉬的純石墨烯氣體偵測器。

The atomic layer thickness of two-dimensional (2D) materials enables them to effectively interact with gas molecules, promoting charge transfer within these materials and allowing for rapid adsorption and desorption of gas molecules on their surface. Graphene and transition metal dichalcogenides, with their high surface area-to-volume ratio, low noise levels, and electronic properties sensitive to environmental changes, are promising candidates for sensor components. In this study, we employed chemical vapor deposition (CVD) to grow MoS₂ and stack it on graphene, designing an acetone gas sensor. We measured the sensor's response to acetone at different concentrations, as well as its rise and fall times, and compared these results with a pure graphene gas sensor without MoS₂.

摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 IX
第一章 緒論 1
1-1 前言 1
1-2 研究動機 1
第二章 理論基礎與文獻回顧 3
2-1 石墨烯簡介 3
2-2 石墨烯製備方法 5
2-2-1 機械剝離法 5
2-2-2 氧化石墨烯還原法 6
2-2-3 碳化矽表面磊晶生長法 6
2-2-4 超臨界流體法 7
2-2-5 電化學剝離法 8
2-2-6 化學氣相沈積法 9
2-3 石墨烯轉印方法 11
2-4 二硫化鉬簡介 13
2-5 二硫化鉬製備方法 16
2-5-1 機械剝離法 16
2-5-2 化學氣相沈積法 17
2-6 氣體偵測器分類 19
2-6-1 純石墨烯氣體偵測器 19
2-6-2 二硫化鉬/石墨烯氣體偵測器 20
2-7 氣體偵測器的常用指標 21
2-7-1 靈敏度/響應度 21
2-7-2 響應時間 & 回復時間 22
第三章 實驗流程及方法 23
3-1 實驗藥品 23
3-2 實驗流程及步驟 24
3-2-1 清洗生長基板 (玻璃/矽基板) 25
3-2-2 化學氣相沉積法 (CVD) 沉積二硫化鉬 26
3-2-3 二硫化鉬轉印 28
3-2-4 石墨烯生長 30
3-2-5 石墨烯轉印 31
3-2-6 指叉電極 33
3-3 實驗儀器 35
3-3-1 電子天平 36
3-3-2 超音波震盪器 37
3-3-3 旋轉塗佈機 38
3-3-4 化學氣相高溫管狀爐 39
3-3-5 旋轉式等離子處理機 41
3-3-6 蒸鍍機 42
3-4 量測儀器 43
3-4-1 電性量測系統 44
3-4-2 金相顯微鏡 46
3-4-3 拉曼光譜儀 47
第四章 結果與討論 48
4-1 石墨烯電性量測與分析 48
4-1-1 不同堆疊層數之石墨烯 OM 圖分析 48
4-1-2 石墨烯拉曼光譜分析 49
4-1-3 不同堆疊層數之石墨烯霍爾效應與電性分析 51
4-2 二硫化鉬元件量測與分析 52
4-2-1 石墨烯/二硫化鉬複合元件製作流程 52
4-2-2 二硫化鉬 OM 圖分析 53
4-2-3 二硫化鉬轉印石墨烯 OM圖分析 54
4-2-4 二硫化鉬拉曼光譜分析 55
4-3 純石墨烯氣體偵測器響應分析 56
4-3-1不同接觸面積的氣體偵測器響應圖 56
4-3-2單層時墨西的氣體偵測器響應圖 57
4-3-3雙層石墨烯的氣體偵測器響應圖 60
4-4 二硫化鉬/石墨烯氣體偵測器響應圖分析 63
4-5 純石墨烯氣體偵測器響應回復時間分析 66
4-5-1單層石墨烯氣體偵測器響應回復時間圖 66
4-5-2雙層石墨烯氣體偵測器響應回復時間圖 69
4-6 二硫化鉬/石墨烯氣體偵測器響應回復時間分析 72
4-6-1二硫化鉬/石墨烯氣體偵測器響應回復時間圖 72
4-7 純石墨烯與二硫化鉬/石墨烯氣體偵測器比較 75
第五章 結論 76
參考文獻 77

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