臺灣博碩士論文加值系統

由於患有慢性疾病的人口逐年上升，利用（Micro Electro Mechanical
Systems , MEMS）技術製造的微型藥物輸送系統也逐漸普及。藥物傳遞
系統（Drug Delivery Systems , DDS）是由藥物儲存器、微型幫浦、閥門、
微型感測器、微型通道以及相關電路所組成。典型的微型幫浦是也
MEMS 技術所涵蓋的一環，它既可以提供驅動源，又能將藥物精確地輸
送到相對應的器官。因此，微型幫浦在藥物輸送系統中扮演著十分重要
的角色。
黃金電極經過電解反應後，電極會產生腐蝕現象，為了改善電極應
用在電解式微型幫浦的耐腐蝕性，所以使用電化學沉積氧化銥薄膜，但
因循環伏安法（Cyclic voltammetry , CV）沉積所花費的時間過於冗長，
耗費的能源相對來說也會比較多。因此，本論文使用不同方式的電化學
沉積氧化銥薄膜在黃金電極表面以及旋塗 Nafion 薄膜於電極表面進而改
善腐蝕現象及節省能源。首先，經由掃描式電子顯微鏡(SEM)和能量色散
儀(EDS)得知，電極表面成長氧化銥薄膜並且有 Nafion 薄膜附著。接著由
X 光繞射儀(XRD)結果得知，電化學沉積的氧化銥是非晶結構以及 Nafion
薄膜為非結晶體。之後再利用 X 射線光電子能譜(XPS)量測電極表面元素，
II
在銥、氧以及碳的軌域皆有明顯元素鍵結。接下來再利用傅立葉轉換紅
外光譜(FTIR)量測電極表面元素，確認Nafion薄膜有成功附著於電極表面。
透過電化學阻抗圖譜(EIS)量測電極元件，由黃金電極和氧化銥電極內部
結構等效電路圖實驗結果得知，電沉積氧化銥電極阻抗遠低於黃金電極、
但旋塗 Nafion 薄膜又會使阻抗提高。由極化阻抗(Tafel)量測，氧化銥薄膜
可以改善電極的耐腐蝕性。與黃金電極相比，氧化銥具有良好的耐腐蝕
性，再旋塗 Nafion 薄膜以再改善電極的耐腐蝕性。因此，電沉積氧化銥
以及旋塗 Nafion 薄膜皆可以提高電極的耐腐蝕性和電化學性能。最後，
本研究成功地將氧化銥及 Nafion 薄膜應用在電解式微型幫浦之領域。

Due to the increasing population affected by chronic diseases, microscale
drug delivery systems manufactured using MEMS (Micro-Electro-Mechanical
Systems) technology are becoming more prevalent. A Drug Delivery System
(DDS) comprises a drug reservoir, micro-pumps, valves, micro-sensors, microchannels, and associated circuits. Micro-pumps, a key component covered by
MEMS technology, not only serve as a driving source but also precisely deliver
drugs to respective organs in DDS. Therefore, micro-pumps play a crucial role
in drug delivery systems.
After electrochemical reactions, gold electrodes undergo corrosion. To
enhance the corrosion resistance of electrodes for application in electrolytic
micro-pumps, Iridium oxide thin films are electrochemically deposited.
However, the time-consuming nature of cyclic voltammetry (CV) deposition led
to the exploration of alternative deposition methods to improve corrosion
resistance and save energy. In this paper, different methods for depositing
IV
Iridium oxide films on gold electrodes and spin-coating Nafion films on
electrode surfaces were employed to mitigate corrosion and energy consumption.
Scanning Electron Microscopy (SEM) and Energy Dispersive
Spectroscopy (EDS) revealed the growth of Iridium oxide films on the electrode
surface with attached Nafion films. X-ray Diffraction (XRD) indicated that the
electrochemically deposited Iridium oxide exhibited an amorphous structure,
and the Nafion film was non-crystalline. X-ray Photoelectron Spectroscopy
(XPS) measurements on the electrode surface confirmed significant elemental
bonding in the regions of Iridium, oxygen, and carbon. Fourier Transform
Infrared Spectroscopy (FTIR) demonstrated successful Nafion film attachment
to the electrode surface.
Electrochemical Impedance Spectroscopy (EIS) results revealed that the
impedance of the electrochemically deposited Iridium oxide electrode was
significantly lower than that of the gold electrode. However, the spin-coated
Nafion film increased impedance. Tafel polarization measurements indicated
that the Iridium oxide film could improve the electrode's corrosion resistance.
Compared to gold electrodes, Iridium oxide exhibited superior corrosion
resistance, further enhanced by the spin-coating Nafion film.
In conclusion, electrochemically deposited Iridium oxide and spin-coated
Nafion films both contribute to improved corrosion resistance and
electrochemical performance of the electrodes. Finally, this study successfully
applied Iridium oxide and Nafion films in the field of electrolytic micro-pumps.

中文摘要 I
Abstract III
第一章 緒論 1
1-1前言 1
第二章 基礎理論與文獻回顧 4
2-1微型幫浦介紹 4
2-2現今微流量幫浦驅動方式 5
2-2-1 機械式 5
2-2-2 非機械式 17
2-3微型幫浦在生醫領域應用 25
2-3-1細胞培養(Cell culturing) 26
2-3-2血液輸送(Blood transport) 27
2-3-3藥物輸送(Drug delivery) 28
2-4耐腐蝕材料及其定義 30
2-5氧化銥介紹 31
2-5-1氧化銥成長方式 33
2-6全氟磺酸化樹酯(Nafion)介紹 37
2-6-1全氟磺酸化樹酯(Nafion)製備方法 38
2-7電解式幫浦驅動原理 40
2-7-1法拉第電解定律 40
2-7-2電解理論 41
第三章 實驗製程與分析設備 42
3-1 元件設計 42
3-2 實驗步驟 42
3-2-1電極製作 42
3-2-2 氧化銥電解液調製 44
3-2-3氧化銥電極製作 44
3-2-4 Nafion薄膜製作 45
3-2-5微型幫浦外殼製作與組裝 45
3-3 實驗儀器設備 46
3-3-1 電化學分析儀 46
3-3-2 掃描式電子顯微鏡(SEM)和能量散射光譜儀(EDS) 49
3-3-3 X光繞射儀(XRD) 50
3-3-4 X射線光電子光譜(XPS) 50
3-3-5 傅立葉轉換紅外光譜儀(FTIR) 51
3-3-6接觸角量測 51
第四章 實驗結果與討論 63
4-1 掃描式電子顯微鏡（Scanning Electron Microscopy, SEM） 63
4-1-1 Nafion薄膜 SEM及EDS面分析 64
4-2 透過循環伏安法成長氧化銥過程 68
4-3 透過定電流法成長氧化銥過程 70
4-4 X光電子能譜儀（X-ray Photoelectron Spectrometer,XPS） 72
4-4-1 Nafion薄膜XPS分析 78
4-5 X光繞射儀（X-Ray Diffraction, XRD） 82
4-5-1 Nafion薄膜XRD分析 83
4-6 傅立葉轉換紅外譜 (FTIR) 86
4-7 電化學阻抗圖譜(Electrochemical impedance spectroscopy, EIS) 88
4-7-1 Nafion薄膜EIS分析 92
4-8 極化曲線(Tafel) 97
4-8-1 Nafion薄膜Tafel分析 100
4-9 接觸角(Contact angle) 105
4-9-1 Nafion薄膜 106
4-10 流速(Flow Rate) 107
4-10-1 長期流速實驗 128
第五章 結論與未來展望 133
5-1結論 133
5-2未來展望 134

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