臺灣博碩士論文加值系統

摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 XI
Chapter 1 緒論 1
1.1 前言 1
1.2 背景&動機 3
1.3 論文貢獻 4
1.4 論文大綱 4
Chapter 2 葉綠素a螢光量測原理&感測器&系統原理 5
2.1 文獻回顧 5
2.1.1 葉綠素a螢光量測整合方法比較 5
2.1.2 市售比較 10
2.2 葉綠素螢光 13
2.2.1 葉綠素a螢光測量 13
2.3 感測器之選擇 15
2.4 光電二極體原理 15
2.4.1 蕭特基光電二極體(Schottky BarrierDiodes) 16
2.4.2 金半金光電二極體(Metal Semiconductor-Metal Photodiodes) 19
2.5 MSM接面理論 21
2.5.1 蕭特基接觸(Schottky Contant) 21
2.5.2 金半金接面理論 24
2.5.3 光照響應度 27
2.5.4 量子效率 27
2.5.5 電極 28
2.6 光感測器架構 29
2.6.1 基板 29
2.6.2 絕緣層 30
2.6.3 吸收層 31
2.6.4 透明導電層 31
2.7 射頻磁控濺鍍(RF magnetron sputtering)系統與電漿原理 31
2.8 薄膜沉積原理 32
2.9 測量原理 32
2.9.1 散射法 32
2.9.2 葉綠素a螢光反應 33
2.10 海洋雲 34
2.10.1 MySQL海洋雲資料庫 35
2.10.2 402中央控制管理中心 37
2.11 商用感測器 38
Chapter3 實驗方法與步驟 40
3.1 整體感測系統規劃 40
3.2 晶片完整架構圖 40
3.3 晶片製作流程 41
3.3.1 矽基板清洗 41
3.3.2 絕緣層備製 42
3.3.3 吸收層備製 42
3.3.4 濺鍍沉積步驟 42
3.3.5 退火處理 42
3.3.6 感光晶片電極光罩圖形設計 43
3.3.7 製程&電極沉積 43
3.4 程式 44
3.5 感測電路 46
3.5.1 NMOS(2SK30A) 48
3.5.2 LM324 48
3.6 感測器系統整體架構、外殼設計 48
3.7 晶片薄膜量測 55
3.7.1 光學顯微鏡Optical Microscope(OM) 55
3.7.2 表面輪廓儀alpha step(α-step) 56
3.7.3 X射線繞射儀X-Ray Diffraction(XRD) 57
3.7.4 I-V曲線追蹤儀(IV Curve Tracer) 57
3.7.5 掃描電子顯微鏡Scanning Electron Microscope(SEM) 58
3.8 配合AIoT智慧化之養殖環境系統之場域葉綠素數值測量 58
3.8.1 海洋大學電機一館107海水魚缸場域 59
3.8.2 海洋大學之海洋生物之培育館 60
3.8.3 海大濱海校區旁小艇碼頭場域 61
3.8.4 海洋大學之水生生物研究暨保育中心 61
3.8.5 雲林縣水林鄉魚蝦養殖池場域 62
3.8.6 台南市學甲區魚塭場域 63
Chapter 4場域實測與葉綠素感測器實驗結果 65
4.1 感測器晶片薄膜特性測量結果 65
4.1.1 光學顯微鏡Optical Microscope(OM) 65
4.1.2 表面輪廓儀alpha step(α-step) 66
4.1.3 X射線繞射儀X-Ray Diffraction(XRD) 68
4.1.4 I-V曲線追蹤儀(IV Curve Tracer) 70
4.1.5 掃描電子顯微鏡Scanning Electron Microscope(SEM) 73
4.2 整體的改善 75
4.2.1 薄膜參數改良 75
4.2.2 電路設計&程式設計改良 78
4.2.3 電源設計改良 78
4.3 感光晶片(PD)成品 78
4.4 葉綠素感測器系統成品 79
4.5 葉綠素感測器測量結果 80
4.5.1 結合兩者感測器進行校正測量 80
4.5.2 結合兩者感測器進行隨機性測量 81
4.5.3 商用之感測器與自製之感測器清潔測量 84
4.5.4 商用之感測器與自製之感測器未清潔測量 84
4.6 各場域實測測量之結果 86
4.6.1 海洋大學電機一館107熱帶觀賞魚魚缸場域 87
4.6.2 海洋大學之海洋生物培育館 89
4.6.3 海大濱海校區旁小艇碼頭場域 92
4.6.4 海洋大學之水生生物保育中心 95
4.6.5 雲林縣水林鄉魚蝦養殖池場域 97
4.6.6 台南市學甲區魚塭場域 100
4.6.7 場域ANOVA分析 103
4.7 自製與文獻比較 104
4.8 自製感測器與各家商用感測器比較 104
Chapter 5結論與未來展望 106
5.1 結論 106
5.2 未來展望 107
參考文獻 108

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