臺灣博碩士論文加值系統

摘要 II
Abstract III
目錄 V
表格目錄 X
第1章 緒論 1
1.1 研究動機 1
1.2 文獻回顧 2
1.2.1 用於神經記錄的高原形柔性聚合物微電極陣列 2
1.2.2 通過葡聚醣犧牲層對超柔性基板進行金屬化和生物圖案化 4
1.2.3 用於神經和肌肉表面接口的基於 PDMS 的集成可拉伸微電極陣列 6
1.2.4 旋塗聚二甲基矽氧烷的平面化和邊珠減少 8
1.2.5 一種新的 PPG 模塊的設計和驗證，用於獲取用於高精度生物醫學傳感的高質量生理信號 9
1.2.6 文獻回顧小結 10
1.3 研究目標 11
第2章 研究方法 13
2.1 可伸縮式電極設計 13
2.1.1 電極結構與製造 13
2.2 含有絕緣層ParyleneC的可伸縮式電極製程流程 13
2.2.1 晶片前處理 14
2.2.2 PDMS可伸縮式結構製作 15
2.2.3 可伸縮式電極貼片圖案化 16
2.2.4 導電金屬圖案濺鍍 17
2.3 可伸縮式電極貼片的量測方法 17
2.3.1 電阻值量測 17
2.3.2 厚度量測 18
2.3.3 拉伸試驗 18
第3章 研究成果 19
3.1 參數測試 19
3.1.1 PDMS懸塗厚度的參數整理 19
3.1.2 光阻AZ4620旋塗厚度的參數整理 19
3.2 製程結果 21
3.2.1 電極曝光顯影後進行濺鍍的結果 21
3.2.2 電極lift off後的結果 22
3.3 量測結果 23
3.3.1 貼片電阻量測結果 24
3.3.2 貼片拉伸試驗結果 25
3.3.3 PDMS封裝 28
3.4 遭遇問題 29
3.4.1 銅與金的比較 29
第4章 總結與未來工作 30
4.1 總結 30
4.2 未來工作 30
4.2.1 與元件貼合 30
4.2.2 拉伸後的電極貼片受損情況 32
參考文獻 33
附錄一 可伸縮式貼片規格比較 35
附錄二 PAA水溶性犧牲層 36
附錄三 在PDMS與金屬介面增加HEMA塗層 37

1. Pereira, T., et al., Photoplethysmography based atrial fibrillation detection: a review. npj Digital Medicine, 2020. 3(1).
2. Ghamari, M., A review on wearable photoplethysmography sensors and their potential future applications in health care. International Journal of Biosensors & Bioelectronics, 2018. 4(4).
3. Kao, Y.-H., P.C.P. Chao, and C.-L. Wey, Design and Validation of a New PPG Module to Acquire High-Quality Physiological Signals for High-Accuracy Biomedical Sensing. IEEE Journal of Selected Topics in Quantum Electronics, 2019. 25(1): p. 1-10.
4. Lee, G.H., et al., . Science Advances, 2022. 8(15).
5. Kim, J.-M., C. Im, and W. Lee, Plateau-Shaped Flexible Polymer Microelectrode Array for Neural Recording. Polymers, 2017. 9(12): p. 690.
6. Tseng, P., I. Pushkarsky, and D. Di Carlo, Metallization and Biopatterning on Ultra-Flexible Substrates via Dextran Sacrificial Layers. PLoS ONE, 2014. 9(8): p. e106091.
7. Liang, G., et al., A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues. IEEE Transactions on Biomedical Engineering, 2010. 57(10): p. 2485-2494.
8. Baëtens, T. and S. Arscott, Planarization and edge bead reduction of spin-coated polydimethylsiloxane. Journal of Micromechanics and Microengineering, 2019. 29(11): p. 115005.
9. Zhou, C., et al., Study of Artifact-Resistive Technology Based on a Novel Dual Photoplethysmography Method for Wearable Pulse Rate Monitors. Journal of Medical Systems, 2016. 40(3).
10. Ha, Y., et al., Hemispherical Microelectrode Array for Ex Vivo Retinal Neural Recording. Micromachines, 2020. 11(5): p. 538.
11. Gonzalez, M., et al., Design and performance of metal conductors for stretchable electronic circuits. Circuit World, 2009. 35(1): p. 22-29.
12. Verplancke, R., et al., Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance. Journal of Micromechanics and Microengineering, 2012. 22(1).
13. Du, P., X. Lin, and X. Zhang. Dielectric constants of PDMS nanocomposites using conducting polymer nanowires. IEEE.
14. Wikipedia, c., Titanium, in Wikipedia, The Free Encyclopedia.
15. Park, D. and T.S. Oh, Stretchable Deformation-Resistance Characteristics of Metal Thin Films for Stretchable Interconnect Applications II. Characteristics Comparison for Au, Pt, and Cu Thin Films. Journal of the Microelectronics and Packaging Society, 2017. 24(3): p. 19-26.
16. Chou, N., S. Yoo, and S. Kim. Fabrication of stretchable and flexible electrodes based on PDMS substrate. IEEE.