臺灣博碩士論文加值系統

本論文之研究目的在於開發非接觸式高速小型轉軸之動態偏擺量測系統，使用雷射光做為量測媒介，搭配一維光電二極體陣列，以非觸式的方式量測小型轉軸在高速運轉狀態下之偏移與傾側。首先彙整有關轉軸偏移量測之參考文獻，了解轉軸可能發生偏移與傾側形式，以及分析已發展的量測方式，而後針對轉軸可能偏移型式進行量測系統設計開發。整個系統的硬體架構包括雷射光束產生裝置和光電二極體陣列等；訊號處理部份則有光電二極體陣列之驅動電路以及徑向和軸向的位移編碼電路；除此之外，在測試方面還採用訊號擷取卡(DAQ卡)和LabView軟體進行訊號擷取和分析。轉軸徑向偏移是使用光遮斷法量測，轉軸軸向傾側則以反射法量測，搭配光電二極體陣列接收雷射光偏移，其類比電荷輸出除了類比訊號處理外，同時也採用數位電路編碼方式處理訊號以減少干擾訊號所造成的誤差且增加訊號接收時的精確度。本研究並深入探討訊號處理方式對位移量測解析度、線性度以及敏感度之影響，用以提升量測系統特性。並且以數位處理方式來測試偏擺量測系統在量測高速轉軸之動態特性。

The aim of this thesis is to develop a non-contact error motion measurement system for small shafts in high speed. Laser diodes and linear photodiode arrays are built up as detectors for measuring radial and axial error motions. Starting with literature surveying, different types of error motions and measuring methods were studied. Our measuring system was designed and developed based on the determined error motions. This system’s configuration consists of laser ray generators and photodiode arrays; the signal processor includes driver and encoding circuits for radial and axial error motions measurement; and for automatic data acquisition and processing, DAQ Card and LabView software are applied. The shadow principle is employed to measure the radial error motion, and the axial error motion is detected by the reflective principle. The photodiodes detect the motions of laser rays and transfer them into electronic charges. Besides the analog signals processing, digital processing circuits are developed to decrease the interference noise and to increase sensing accuracy. This thesis also explores the influence of signal processing methods on resolution, linearity and sensitivity thoroughly; and by applying the digital processing method the dynamic behavior of the developed system is also empirically studied.

目錄
致謝 I
中文摘要 II
英文摘要 III
目錄 IV
圖目錄 VI
表目錄 IX
符號表 X
第一章　緒論 1
1. 1研究動機及背景 1
1. 2研究內容 5
第二章　轉軸偏移量測系統之設計開發 6
2.1轉軸之動態分析 6
2.2光電元件 8
2.3光學式徑向偏移量測系統 8
2.3.1徑向偏移之光學量測方法分析 8
2.3.2徑向雷射光束組之架構與組立對正方式 11
2.4光學式軸向偏移量測系統 15
2.4.1軸向偏移之光學量測方法分析 15
2.4.2軸向雷射光束組架構與對正 18
第三章　系統訊號分析與處理 23
3.1驅動電路 23
3.2徑向偏移之類比訊號分析與處理 25
3.2.1訊號穩定度分析研究 26
3.2.2訊號解析度分析 28
3.2.2.1光電二極體單元類比輸出電壓之分析 28
3.2.2.2濾波處理與門檻時間差分析 34
3.3軸向偏移之類比訊號分析與處理 38
3.3.1穩定度分析研究 38
3.3.2訊號解析度分析 39
3.4各種訊號處理方式之實驗分析結果 42
第四章　數位訊號處理 44
4.1徑向數位訊號編碼 44
4.2軸向數位訊號編碼 47
4.3數位訊號擷取與處理 49
4.4實驗測試 50
4.4.1徑向偏移實驗 50
4.4.1軸向向偏移實驗測試 52
第五章　系統動態測試以及量測誤差分析 55
5.1動態測試 55
5.1.1徑向系統動態測試 57
5.1.2軸向系統動態測試 59
5.2其他誤差來源 61
5.2.1徑向誤差 61
5.2.2軸向誤差 63
第六章：總結與未來展望 65
參考文獻 67

[1]Tlusty, Jiri, “System and methods of testing machine tools.”, Microtecnic, Vol. 13, No. 4, pp. 163-178, 1959.
[2] Bryan, J. B., Clouser, R. W., and Holland, E.,“Spindle accurancy.”, American Machinist, Vol. 111, No. 25, 1967.
[3] Marsh, Eric, and Grejda, Robert, “Experiences with the master axis method for measuring spindle error motions.”, Precision Engineering, Vol. 24, pp. 50-57, 2000.
[4] Ahn, Hyeong-Joon, Jeon, Soo, and Han, Dong-Chul, “Error analysis of the cylindrical capacitive sensor for active magnetic bearing spindles.”, Transactions of the ASME, Vol. 122, No. 1, pp. 102-107, 2000.
[5] Park, Yoon-Chang and Kim, Seung-Woo, “Measurement of spindle radial motion by moirè technique of concertric-circle gratings”, International journal of machine tools and manufacture, Vol. 34, No. 7, pp. 1019-1030, 1994.
[6] ANSI/ASME B89.3.4, “Axes of rotation, Methods for specifying and testing.”, American Society of Mechanical Engineers, 1985.
[7] Bryan, J. B., and Vanherck, P., “Unification of terminology concerning the error motion of axes of rotation.”, C.I.R.P. annals ... manufacturing technology, Vol. 24, pp. 555-562, 1975.
[8] Yang, Yuanhai, “The design of eco spot and optical focusing in automatic laser tracking.”, Optics and Laser Technology, Vol. 18, pp. 75-79, 1986.
[9] Gao, Wei, Kiyono, Satoshi, and Nomura, Tadatoshi, “A new multiprobe method of roundness measurements.”, Precision Engineering, Vol. 19, pp. 37-45, 1996.
[10] Xu, Yuxian, Li, Qingxiang, Xue, Shiiu, Wang, Jian, Huang, Dongxiao, and Zhang, Lianging, “Interferometer distance measurement system using a linear detector array.”, Optical Engineering, Vol. 37, Mo. 8, 1998.
[11] Cohen, L. G., and Glynn, P., “Dynamic measurement of optical fiber diameter.”, Review of Scientific Instruments, Vol. 44, No. 12, pp. 1749-1952, 1973.
[12] Sun, Heiyin, “Study of laser line generator optics”, Applied Optics, Vol. 111, No. 1, 2000
[13] Sun, Heiyin, “Standardization of the definition and measurement of the line length and fan angle of laser line generators”, Vol. 37, No. 21, 1998
[14] Hecht, Eugene, “Optics”, Addison Wesley, pp.469, 2000
[15]. Texas Advanced Optoelectronic Solution data sheet.
[16] Texas Instrument data sheet.
[17] 范光照與張郭益, “精密量具及機件檢驗”, 高立圖書有限公司