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研究生:許嘉桓
研究生(外文):Hsu, Chia-Huan
論文名稱:新穎共焦顯微術-使用色像差與位置敏感偵測技術
論文名稱(外文):Advanced confocal microscopy utilizing the chromatic aberration and position sensitive detection
指導教授:詹明哲詹明哲引用關係
指導教授(外文):Chan, Ming-Che
口試委員:詹明哲曾盛豪卓冠宇林碩泰
口試委員(外文):Chan, Ming-CheTseng, Sheng-HaoZhuo, Guan-YuLin, Shou-Tai
口試日期:2016-10-27
學位類別:碩士
校院名稱:國立交通大學
系所名稱:照明與能源光電研究所
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:105
語文別:中文
論文頁數:125
中文關鍵詞:共焦顯微術彩色共焦顯微術色像差位置敏感偵測器
外文關鍵詞:Confocal MicroscopyChromatic Confocal MicroscopyChromatic AberrationPosition Sensitive Detector
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在半導體製程微小化及因應快速檢測需求下,自動光學檢測設備提供工業產品檢測以及產品瑕疵檢測。本研究提出具有數十奈米之縱向解析度、數微米的動態範圍、以及快速成像之新穎共焦顯微系統。在實驗中使用638奈米半導體雷射以及515奈米二倍頻雷射作為光源,搭配二維掃描陣鏡、精密三維平台及高數值孔徑之物鏡進行聚焦,樣品訊號經由光路進入針孔達到空間濾波、通過光柵進行橫向分光,最後進入位置敏感探測器(PSD)得到樣品訊號。根據光源色像差造成的聚焦特性,經由PSD可以讀取反射面上的深度資訊得到三維的影像。本研究藉由量測樣品(USAF 1951解析度測試表、光碟紀錄層、繞射光柵、積體電路)展示其最佳解析度,此實驗結果展現出本研究技術在光學自動檢測的應用潛力。
Automated optical inspecting (AOI) equipments have been used for product inspection and defect detection. In this thesis, we introduce a novel confocal microscopic system. The main feature of novel confocal microscopy includes a tens of nanometer-longitudinal resolution, a micron dynamic range, and fast imaging. In our experiment, a 638 nm semiconductor laser and a 515 nm laser were utilized as the light source. Then the microscope was basically composed of a 2D Galvo-mirror, a pair of relay lens, a high numerical aperture objective lens, and a precisely 3D stage. The reflected signals pass through pinhole as spatial filter and split in lateral direction by a diffraction grating. Finally, reflected light from the sample was detected with Position Sensitive Detectors (PSD). The focusing position of different wavelength depends on the chromatic aberration of objective. And the position of reflection plane was retrieved by the signals from PSD. By single 2D scanning, the 3D depth-annotated image of the sample was carried out. In this experiment, several samples (USAF 1951’s resolution test chart, data layer from compact disc, diffraction grating and Integrated circuit.) were adopt for demonstration. From the experimental results, this work shows the high potential for high-resolution and fast AOI applications.
摘要…………………………………………………………………………Ⅰ
Abstract……………………………………………………………………Ⅱ
致謝…………………………………………………………………………Ⅲ
目錄…………………………………………………………………………Ⅳ
圖目錄………………………………………………………………………Ⅶ
表目錄……………………………………………………………………ⅩⅠ
符號說明…………………………………………………………………ⅩⅡ
第一章緒論…………………………………………………………………1
1.1 前言……………………………………………………………………1
1.2 研究動機及目標………………………………………………………2
1.3 論文大綱………………………………………………………………4
第二章實驗原理……………………………………………………………5
2.1 共焦顯微術原理………………………………………………………5
2.2 彩色共焦顯微術原理…………………………………………………21
2.3 位置敏感偵測器(PSD) ………………………………………………31
2.4 差動共焦顯維術………………………………………………………46
第三章實驗架構介紹………………………………………………………51
3.1 系統架構………………………………………………………………51
3.2 光學系統………………………………………………………………55
3.3 掃瞄系統………………………………………………………………61
3.4 Labview及其他儀器介紹…………………………………………….62
3.5 樣品介紹………………………………………………………………67
3.4.1 1951 USAF解析度測試圖(1951 USAF resolution test chart)………………………………………………………………………………67
3.4.2 光碟(Compact Disc, CD) …………………………………….69
3.4.3 繞射光柵(Diffraction grating) ……………………………71
3.4.4 電子抹除唯讀記憶體 (Electrically Erasable Programmable Read Only Memory, EEPROM) ……………………………………………72
3.4.5 THCV215 影像數據傳輸發射器及接受器………………………74
第四章 實驗流程及結果…………………………………………………75
4.1 實驗流程………………………………………………………………75
4.2 樣品掃描結果與分析…………………………………………………79
4.3 縱向深度解析…………………………………………………………87
4.3.1縱向深度解析流程………………………………………………….87
4.3.2半導體紅光雷射掃描結果………………………………………….89
4.3.3二倍頻綠光雷射掃描結果…………………………………………106
第五章 結論與未來展望……………………………………………….121
5.1 結論………………………………………………………………….121
5.2 未來展望…………………………………………………………….122
參考文獻………………………………………………………………….124
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