臺灣博碩士論文加值系統

在半導體製程微小化及因應快速檢測需求下，自動光學檢測設備提供工業產品檢測以及產品瑕疵檢測。本研究提出具有數十奈米之縱向解析度、數微米的動態範圍、以及快速成像之新穎共焦顯微系統。在實驗中使用638奈米半導體雷射以及515奈米二倍頻雷射作為光源，搭配二維掃描陣鏡、精密三維平台及高數值孔徑之物鏡進行聚焦，樣品訊號經由光路進入針孔達到空間濾波、通過光柵進行橫向分光，最後進入位置敏感探測器(PSD)得到樣品訊號。根據光源色像差造成的聚焦特性，經由PSD可以讀取反射面上的深度資訊得到三維的影像。本研究藉由量測樣品(USAF 1951解析度測試表、光碟紀錄層、繞射光柵、積體電路)展示其最佳解析度，此實驗結果展現出本研究技術在光學自動檢測的應用潛力。

Automated optical inspecting (AOI) equipments have been used for product inspection and defect detection. In this thesis, we introduce a novel confocal microscopic system. The main feature of novel confocal microscopy includes a tens of nanometer-longitudinal resolution, a micron dynamic range, and fast imaging. In our experiment, a 638 nm semiconductor laser and a 515 nm laser were utilized as the light source. Then the microscope was basically composed of a 2D Galvo-mirror, a pair of relay lens, a high numerical aperture objective lens, and a precisely 3D stage. The reflected signals pass through pinhole as spatial filter and split in lateral direction by a diffraction grating. Finally, reflected light from the sample was detected with Position Sensitive Detectors (PSD). The focusing position of different wavelength depends on the chromatic aberration of objective. And the position of reflection plane was retrieved by the signals from PSD. By single 2D scanning, the 3D depth-annotated image of the sample was carried out. In this experiment, several samples (USAF 1951’s resolution test chart, data layer from compact disc, diffraction grating and Integrated circuit.) were adopt for demonstration. From the experimental results, this work shows the high potential for high-resolution and fast AOI applications.

摘要…………………………………………………………………………Ⅰ
Abstract……………………………………………………………………Ⅱ
致謝…………………………………………………………………………Ⅲ
目錄…………………………………………………………………………Ⅳ
圖目錄………………………………………………………………………Ⅶ
表目錄……………………………………………………………………ⅩⅠ
符號說明…………………………………………………………………ⅩⅡ
第一章緒論…………………………………………………………………1
1.1 前言……………………………………………………………………1
1.2 研究動機及目標………………………………………………………2
1.3 論文大綱………………………………………………………………4
第二章實驗原理……………………………………………………………5
2.1 共焦顯微術原理………………………………………………………5
2.2 彩色共焦顯微術原理…………………………………………………21
2.3 位置敏感偵測器(PSD) ………………………………………………31
2.4 差動共焦顯維術………………………………………………………46
第三章實驗架構介紹………………………………………………………51
3.1 系統架構………………………………………………………………51
3.2 光學系統………………………………………………………………55
3.3 掃瞄系統………………………………………………………………61
3.4 Labview及其他儀器介紹…………………………………………….62
3.5 樣品介紹………………………………………………………………67
3.4.1 1951 USAF解析度測試圖(1951 USAF resolution test chart)………………………………………………………………………………67
3.4.2 光碟(Compact Disc, CD) …………………………………….69
3.4.3 繞射光柵(Diffraction grating) ……………………………71
3.4.4 電子抹除唯讀記憶體 (Electrically Erasable Programmable Read Only Memory, EEPROM) ……………………………………………72
3.4.5 THCV215 影像數據傳輸發射器及接受器………………………74
第四章 實驗流程及結果…………………………………………………75
4.1 實驗流程………………………………………………………………75
4.2 樣品掃描結果與分析…………………………………………………79
4.3 縱向深度解析…………………………………………………………87
4.3.1縱向深度解析流程………………………………………………….87
4.3.2半導體紅光雷射掃描結果………………………………………….89
4.3.3二倍頻綠光雷射掃描結果…………………………………………106
第五章 結論與未來展望……………………………………………….121
5.1 結論………………………………………………………………….121
5.2 未來展望…………………………………………………………….122
參考文獻………………………………………………………………….124

[1] D. Meslin, Practical Refraction (Essilor Academy, France, 2008).
[2] T. J. Kim, S. H. Kim, D. H. Do, H. K. Yoo, and D. G. Gweon, “Chromatic confocal microscopy with a novel wavelength detection method using transmittance,” Optics Express, 21, 6286 (2013).
[3] B. S. Chun, K. S. Kim, and D. G. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Review of Scientific Instruments, 80, 073706 (2009).
[4] F. Blateyron, “Chromatic Confocal Microscopy,” Optical Measurment of Surface Topography, 71-106 (2011).
[5] H. J. Tiziani, and H.-M. Uhde, “Three-dimensional image sensing by chromatic confocal microscopy,” Applied Optics, 33, 1838-1843 (1994).
[6] P. J. Duke, and A. G. Michette, Modern microscopies: Techniques and Applications (Springer, New York, 1990).
[7] M. Minsky, “Microscopy Apparatus,” U.S. Patent#3,013,467, 1961(filed Nov, 7, 1957).
[8] P. Davidovits, and M. D. Egger, “Scanning Laser Microscope for Biological Investigations,” Applied Optics, 10, 1615-1619 (1971).
[9] J. B. Pawley, Handbook of Biological Confocal Microscopy (Springer, New York, 1989).
[10] A. R. Rouse, H. Makhlouf, and A. Tanbakuchi, “A multi-point scanner for high frame rate confocal microendoscopy,” Proceedings of SPIE, 7558, 1605-7422 (2010).
[11] T. Tanaami, S. Otsuki, N, Tomosada, Y, Kosugi, M. Shimizu, and H. Ishida, “High-speed 1frame/ms scanning confocal microscope with a microlens and Nipkow disks,” Applied Optics, 41, 4704-4708 (2002).
[12] X. Huang, N. Liu, and J. Cui, “Digital pinhole filter used for detection of confocal microscopy images,” Proceedings of SPIE, 7133, 277-786 (2009).
[13] M. Ishihara and H. Sasaki, “High speed surface measurement using a nonscanning multiple-beam confocal microscope,” Optical Engineering, 38, 1035-1040 (1991).
[14] L. Richard, Optical Measurment of Surface Topography (Springer-Verlag Berlin Heidelberg, Germany, 2011).
[15] E. Dusch, T. Dorval, M. Wachsmuth, “Three-dimensional point spread function model for line-scanning confocal microscope with high-aperture objective,” Journal of Microscopy, 228, 132-138 (2007).
[16] G. Molesini, G. Pedrini, P. Poggi, and F. Quercioli, “Focus-wavelength encoded optical profilometer,” Optics Communications, 49, 229-233 (1984).
[17] S. Kebin, L. Peng, Y. Shizhuo, and L Zhiwen, “Chromatic confocal microscopy using supercontinuum light,” Optics Express, 12, 2096-2101 (2004) .
[18] A. K. Ruprecht, H. J. Tiziani, and T. F. Wiesendanger, “Chromatic confocal microscopy with a finite pinhole size,” Optics Letters, 29, 2130-2132 (2004).
[19] 陳亮嘉,林章民,林世聰,阮忠德, “線上彩色共焦精密顯微形貌掃描量測系統之發展,” 科儀新知203期, 40-60 (2015).
[20] J. T. Wallmark, “A New Semiconductor Photocell Using Lateral Photoeffect,” Proc. IRE, 45, 474-483 (1957).
[21] http:/www.hamamatsu.com/resources/pdf/ssd/psd_techinfo_e.pdf.
[22] C. H. Lee, and J. P. Wang, “Noninterferometric differential confocal microscopy with 2-nm depth resolution,” Optics Communications, 135, 233-237 (1997).
[23] Alberto Diaspro, Confocal and Two-Photon Microscopy: Foundations, Applications and Advances (WILEY, New Jersey, 2002).
[24] K. Carlsson, P. E. Danielsson, R, Lenz, A, Liljeborg, L. Majlöf, and N. Åslund, “Three-dimensional microscopy using a confocal laser scanning microscope,” 10, 53-55 (1985).
[25] C. J. R. Sheppard, and Min Gu, “Aberration compensation in confocal microscopy,” Applied Optics, 30, 3563-3568 (1991).
[26] Baoliang Ge, Yifan Wang, Yujia Huang, Cuifang Kuang, Yue Fang, Peng Xiu, Zihao Rong, and Xu Liu, “Three dimensional resolution and contrast-enhanced confocal microscopy with array detection,” Optics Letters, 41, 2013-2016 (2016).
[28] M. A. Browne, O. Akinyemi, and A Boyde, “Confocal surface scanning utilizing chromatic aberration,” SCANNING, 14, 145-153 (1992).
[28] Timothy R. Corle, Jeffrey T. Fanton, and Gordon S. Kino, “Distance measurments by differenrial confocal optical ranging,” Applied Optics, 26, 2416-2420 (1987).
[29] https://engfac.cooper.edu/mlay/566