臺灣博碩士論文加值系統

面對人口高齡化下逐年攀升的慢性疾病發病率，在醫療資源與人力的使用上勢必大幅上升，為了減緩資源開銷，因此以健康診斷為目的穿戴式電子裝置逐漸興起。然而這些感測裝置若以電池作為能量供給來源會有有限的使用壽命與環保的爭議，因此，近年來各研究團隊紛紛發展從人體身上擷取潛藏的各式能量轉為電能，目的是增加電池的使用壽命，減少對電池的依賴。
有鑑於手環式穿戴裝置的熱潮，加上人體手腕脈搏穩定且規律的跳動，因此本篇論文研究建立在手腕脈搏之振動能量擷取。本論文使用機電轉換效率相當高的壓電材料作為能量擷取器，選取之壓電材料為市面普遍應用的鋯鈦酸鉛(PZT)，製作出橋式結構之脈搏能量擷取器。延續本團隊過去優化的氣膠沉積製程與壓電薄膜之退火、極化參數，本研究探討軟性(AC750)和硬性(MPT)壓電粉末之輸出比較、{3-1}模態與{3-3}模態之輸出比較，並利用數值模擬加以檢驗實驗結果。
實驗結果顯示，在{3-1}模態下利用AC750與MPT壓電粉末製成相同尺寸的雙層壓電能量擷取器，透過脈搏震動，在最佳阻抗下分別產生最大電壓71.1和104.8mV，對應之瞬時輸出功率為5.05和13.4nW；在{3-3}模態下，利用MPT壓電粉末製成單層壓電能量擷取器在最佳阻抗下可產生最大輸出電壓190mV，瞬時輸出功率為4.4nW，儘管目前開發的能量擷取器之輸出功率未達到一定輸出，但仍顯示了脈搏能量擷取應用之可能與潛力。

Due to the growing population with chronic diseases in aging society, the expenses of healthcare increases dramatically. Thus, wearable devices gradually prosper for the purpose of health condition monitoring to reduce healthcare expenses. However, if these sensor devices are powered by batteries, they will cause the limited service time and environmental impact. In order to extend the service time of batteries, or even replace them, many researchers have been studied on transforming the dynamic energy from human motion into electrical energy. Due to the popularity of the wristband-type devices and regular pulse from human arterial pulse, this study is based on harvesting the energy from arterial pulse. The piezoelectric material is chosen to fabricate the energy harvester because of its high electromechanical coupling factor. The bridge-type pulse wave energy harvester (EH) is made by commercial PZT. With the optimized fabrication process of aerosol deposition method, annealing, and poling of PZT thin film by our previous study, the output performances between soft-type (AC750) and hard-type (MPT) PZT, between {3-1} and {3-3} mode are compared, which will further be confirmed by numerical simulation. The experimental results show when operating in {3-1} mode, AC750 and MPT bimorph EH with same dimension generate the maximum voltage of 71.1 mV and 104.8 mV under an optimal load when measuring pulse-wave. The corresponding instantaneous power are 5.05 nW and 13.4 nW. When in {3-3} mode, MPT unimorph EH generates the maximum voltage of 190 mV and 4.4 nW. The output power hasn’t achieved to certain level so far, but it still shows the potential application of pulse-wave EH.

致謝 ii
中文摘要 iii
Abstract iv
目錄 v
圖目錄 viii
表目錄 xii
第1章 緒論 1
1.1 研究動機 1
1.2 論文目標 5
1.3 文獻回顧 6
1.4 論文架構 11
第2章 壓電簡介 12
2.1 壓電材料介紹 12
2.1.1 壓電材料緣起 12
2.1.2 壓電、焦電、鐵電效應 13
2.1.3 壓電材料種類 17
2.2 壓電材料選擇 18
2.3 鋯鈦酸鉛介紹 19
2.4 壓電本構方程式 21
2.5 壓電薄膜製程 24
2.6 壓電薄膜製程比較 27
第3章 橋式能量擷取元件 29
3.1 能量擷取元件結構 29
3.2 元件材料考量 36
3.2.1 壓電材料 36
3.2.2 基板材料 37
3.2.3 工作模態 38
3.3 數值模擬 41
3.3.1 {3-1}工作模態 41
3.3.2 {3-3}工作模態 44
第4章 壓電能量擷取元件製作 48
4.1 氣膠沉積製程 48
4.2 金屬微機電製程 49
4.3 壓電薄膜退火 54
4.4 壓電薄膜極化 55
第5章 實驗結果與討論 57
5.1 壓電材料與薄膜分析 57
5.1.1 晶相分析 57
5.1.2 表面分析 60
5.1.3 元素分析 63
5.1.4 鐵電分析 63
5.2 元件輸出表現 65
5.2.1 量化測試 65
5.2.2 極化電場測試 66
5.2.3 人體量測 67
5.2.4 長時間量測 75
第6章 結論與展望 77
6.1 結論 77
6.2 未來展望 78
參考文獻 80

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