臺灣博碩士論文加值系統

振動量測在今日的工業界應用與實驗室研究，扮演相當重要的角色，產
業對振動感測器的需求也日益增加。單方向的振動感測器，已頗具成果，
但若使用多個單向感測器組合以量測多方向的振動時，其存在相互干擾的
本質問題，嚴重影響量測效果的準確性，必須使用多個相同且對稱結構的
感測器才能達到合理的量測效果，這是很不容易達成的。本研究為了改善
上述單向感測器之缺點，以壓電材料 PVDF 為感測元件，設計製作三維振
動感測器以加強三維振動量測效果並降低寄生偶合效果。此感測器之架構
，包括理論分析、電路設計、系統測試與修正改善；由測試的結果發現，
本感測器在200Hz-400Hz之操作頻率範圍振動響應之線性度佳，其他頻率
量測時，振動響應輸出電壓仍維持在合理的線性區域內。本感測系統之寄
生雜訊極易消除，因為正向振動響應比其他非正向軸所產生的響應強的多
。關鍵詞：振動量測，振動感測器，壓電材料。設計、系統測試與修正改
善；由測試的結果發現，本感測器在200Hz-400Hz之操作頻率範圍振動響
應之線性度佳，其他頻率量測時，振動響應輸出電壓仍維持在合理的線性
區域內。本感測系統之寄生雜訊極易消除，因為正向振動響應比其他非正
向軸所產生的響應強的多。關鍵詞：振動量測，振動感測器，壓電材料。

Abstraction The vibration measurements play
an important role in industry and laboratory. To get suitable
sensors for accurate vibration measurements are desired. One-
dimension vibration sensors have been developed well but they
have intrinsic interfenence problems. This thesis is proposed
to design the piezoelecric-type sensors for the three-dimension
vibration measurements. The PVDF（polyvinylidene fluoride）
material was used as the vibration sensing material. The bases
of sensors are designed to enhance vibration signal but to
reduce noise. The vibration sensing systems were tested using
the Vibration Simulation System series 9363-SR (King Design
Co.). According to the reponse data, the three-dimension
vibration sensor has good linearity in the operation range from
200Hz to 400Hz. For the whole tested frequency range (100Hz-600
Hz), the output curves show reasonable linearity. Comparing
with the non-axial response, the main-axial sensor response is
much strong, so the system parasitic noise can be ignored.
Keywords：piezoelectric material, vibration sensor, vibration
measurement