臺灣博碩士論文加值系統

二氧化釩(VO2)是一種具有金屬-絕緣體轉換特性的材料，從室溫到約68 ℃時，會從原先的半導體態轉變成導體態，並伴隨著電性和光學性質的變化，因為這樣的特性被廣泛的應用在智慧窗玻璃和熱敏元件等。
藉由掺雜高價態的W6+到VO2薄膜中，可以將相轉變溫度點往室溫方向降低，而得到更接近室溫的相轉變溫度增加其應用。
VO2為n型的半導體；鈷酸鍶鑭(La0.5Sr0.5CoO3, LSCO)為p型半導體，將兩種薄膜結合製備出具有整流效應的異質接面。
本實驗的VO2薄膜是利用溶膠凝膠(sol-gel)的方法製備，經由結構的分析和電性的檢測來觀察在不同燒結溫度和不同的掺雜量之下對二氧化釩相變化機制與異質接面的特性改變。

Vanadium dioxide has a property of Metal-insulator Transition . In the room temperature to 68℃,the VO2 undergoes phase transition, accompanied by drastic changes in electric and optical properties. It may used to Smart Windows and thermal element, and etc.
The phase transition temperature decreased by doping W6+ to VO2 thin films. By this way, the VO2 thin film will become more useful in our life.
VO2 is n-type semiconductor and LSCO (La0.5Sr0.5CoO3) is p-type semiconductor. If we combine the VO2 thin film with LSCO thin film, we can obtain the p-n junction.
In this study, the VO2 thin film was formed by sol-gel method. We observed the microstructure and measured the electric property to analyzed the property change of p-n junction property in different sintering temperature and concentration of W6+.

致謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 xii
表目錄 xiii
第一章 序論 1
第二章 文獻回顧 4
2.1氧化釩的基本性質和晶體結構 4
2.1.1釩之基本性質 4
2.1.2 二氧化釩的鍵結和晶體結構 5
2.2二氧化釩薄膜製備技術 11
2.2.1掺雜元素對VO2薄膜的影響 13
2.3鈷酸鍶鑭(La0.5Sr0.5CoO3,LSCO) 23
2.4 溶膠凝膠法之原理概述 25
2.4.1 起使原料的選擇及其製備技術 26
2.4.2 溶膠凝膠法的優點 27
第三章 實驗流程 31
3.1 實驗藥品及基板 31
3.2 實驗流程 32
3.2.1 基板製備 32
3.2.2 溶膠的配置 32
3.2.3試片的製作及熱處理條件 32
3.3 實驗儀器 33
3.3.1場發射掃描式電子顯微鏡(FE-SEM) 33
3.3.2溫度對電組曲線分析 34
3.3.3拉曼散射光譜分析(Raman) 34
3.3.4 I-V 特性量測 34
第四章 結果與討論 37
4.1二氧化釩薄膜分析 37
4.1.1 VO2薄膜的溫度對電阻特性分析 37
4.1.2二氧化釩薄膜的拉曼光譜散色分析 38
4.1.3二氧化釩薄膜SEM分析 38
4.2 V1-xWxO2薄膜特性分析 48
4.2.1 V1-xWxO2薄膜的溫度對電阻特性分析 48
4.2.2 V1-xWxO2薄膜SEM分析 48
4.2.3 V1-xWxO2薄膜的拉曼光譜散射分析 49
4.3 LSCO薄膜特性分析 67
4.3.1 LSCO薄膜的X-ray繞射分析 67
4.3.2 LSCO薄膜的SEM截面觀察 67
4.3.3 LSCO薄膜電阻分析 68
4.3.4 LSCO薄膜基板的選擇 68
4.4 VO2與LSCO形成之p-n薄膜 75
4.4.1 VO2與LSCO形成之p-n薄膜SEM觀察分析 75
4.4.2 VO2與LSCO形成之p-n薄膜I-V量測 75
4.4.3 V1-xWxO2與LSCO形成之p-n薄膜SEM觀察分析 76
4.4.4 V1-xWxO2與LSCO形成之p-n薄膜的I-V量測 77
第五章 結論 103
第六章 參考文獻 104

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