臺灣博碩士論文加值系統

摘 要
學號：M9440007
論文題目：微型甲醛氣體感測器感測性能之研究 總頁數：67頁
學校名稱：國立屏東科技大學 系（所）別：材料工程系
畢業年月:2007.07 學位別：碩士學位論文要
研究生：吳耀庭 指導教授：傅龍明、李佳言 教授
論文摘要內容：
本研究利用微機電技術設計並製作微型半導體式甲醛氣體感測器，其主要目的是要在工業上或住家時，能即時的監測甲醛濃度。感測器以石英玻璃作為底材，研究中使用指叉式電極並結合加熱器、感測電極、感測層，能提供即時、準確的溫度控制能力。
經測試結果顯示，基材加熱至300℃需消耗功率5.2w，感測的甲醛濃度範圍在40ppb至8600ppb之間，且反應時間只需70秒，而回復時間也只需80秒，靈敏度可達0.47kΩ/ppb，並嘗試不同厚度，並將感測層退火與添加20nm金當催化劑和co-sputter氧化鋁等方式，以得到較佳的靈敏度與偵測限度，實驗後發現感測層的電阻相對變化量與甲醛氣體濃度幾乎呈線性關係，可應用於工業與住家作即時的檢測。


關鍵字：甲醛、微型加熱板、NiO薄膜、co-sputter、優化

Abstract
Student ID：M9440007
Title of Thesis：The Gas Sensing Properties of Formaldehyde Gas Sensor
Total Pages：67
Name of Institute：National Ping-Tung University of Science & Technology
Name of Department：Department of Materials Engineering
Date of Graduation：2007.07 Degree Conferred：Master
Name of Student：Yan-Ting Wu Adviser：Lung-Ming Fu, Chia-Yen Lee
The Contents of Abstract in this Thesis:
The purpose of this study is to design and develop semiconductor-type Formaldehyde Gas Sensor by MEMS. This sensor is suitable not only for industrial process monitoring, but also for the detection of formaldehyde concentrations in buildings in order to act as the safeguard of the human’s health condition. In the present study, the glass substrate is used as a base, then upon this base, a sensing layer, a heating device and IDEs are integrated. The integrated micro-hotplates in the proposed design provide an instantaneous and precise temperature control capability.
The current experimental results show that applied voltage of 5.2W yields a constant temperature of 300 ◦C. The range of formaldehyde detected of 40 to 8600 ppb that the time response of the gas sensor developed in the present study. The average time constant of the proposed formaldehyde gas sensor is determined to be 70s for formaldehyde concentrations in the range 0–3 ppm at a micro-hotplate temperature of 300 ◦C. The recovery time of the proposed formaldehyde gas sensor is determined to be 80s that sensitivity of 0.47kΩ/ppb at 300℃and a detection limit below 800ppb. The purpose of this study is to obtain the better sensitivity and the minimal monitoring concentration. The result of this experiment presented the difference of resistance of sensing layer is proportion to the concentration of formaldehyde.



Keywords: formaldehyde, micro hotplate, NiO thin film, co-sputter

目錄
誌謝 Ⅰ
摘要 Ⅱ
Abstract Ⅲ
目錄 Ⅴ
表目錄 Ⅸ
圖目錄 Ⅹ
第1章 緒論 1
1.1前言 1
1.2研究動機 2
1.3文獻回顧 3
1.3.1甲醛的性質、用途 3
1.3.2甲醛對人體健康的影響 4
1.3.3 環境中甲醛之來源 6
1.3.4 甲醛的採樣與測定 6
1.4 氣體感測器的發展現況 7
1.5 研究方法與架構 16
第2章 理論基礎 17
2.1氧化鎳性質特徵 17
2.1.1 氧化鎳的材料性質 17
2.1.2 氧化鎳的導電性質 18
2.2 氧化鎳的氣體感測機制 20
2.2.1 白金電阻加熱原理 20
2.2.2 電阻溫度係數 21
2.2.3 電阻值計算 22
2.3 微型氣體感測器製作原理 23
2.3.1 氣體吸附機制 24
2.3.2 氧氣的吸附 26
2.3.3 還原氣體的吸附 27
2.3.4 甲醛氣體的吸附 27
2.4 催化劑的作用 28
2.5 電子槍蒸鍍系統 30
2.6 真空濺鍍系統 31
第3章 感測器之設計 33
3.1氣體感測器設計與製造 33
3.1.1 光罩繪製 33
3.1.2 微型感測器結構立體圖 34
3.2 實驗步驟 35
3.2.1清洗石英玻璃基材 35
3.2.2 微影製程 36
3.3 薄膜的沉積 38
3.3.1 白金加熱電極與感測電極的製作 38
3.3.2 金屬層剝離製程 40
3.3.3 濺鍍感測層製程 40
3.4 電訊量測儀 41
3.5 氣體濃度電性測試系統 42
第4章 結果與討論 44
4.1 微感測器晶片 44
4.2 氣體感測器SEM圖 44
4.3 微加熱器量測 46
4.4 指叉式電極與無指叉式電極的比較 46
4.5 感測層退火後的影響 48
4.6 基材溫度對氧化鎳氣體感測器的影響 51
4.7 厚度對氧化鎳氣體感測器的影響 53
4.8 微氣體感測器之選擇性 54
4.9 微氣體感測器反應時間與回復時間 55
4.10 金催化劑對氧化鎳氣體感測器的影響 57
4.11 co-sputter 氧化鎳與氧化鋁 58
第5章 結論與未來展望
5.1 結論 60
5.2 未來展望 61
參考文獻 62
作者簡介 67

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