臺灣博碩士論文加值系統

本論文主要是將自行研製的二氧化碳雷射，應用在化學氣相沉積（Chemical Vapor Deposition，簡稱CVD）製程上。因為二氧化碳雷射造價便宜、容易維護、輸出功率大，是一個理想的工業用雷射，也曾有人將它應用於LICVD法。我們除了延續前人在這方面的研究，在不同的反應槽中成長出非晶型二氧化矽薄膜及碳質薄膜。此外我們也在PECVD系統成長薄膜的同時，引導二氧化碳雷射光斜向進入PECVD反應室中，照射在矽基板上，在低溫製程下(55℃)，改善非晶型氮化矽氫薄膜及二氧化矽薄膜之品質：如折射率增加，膜之緻密性及平整度佳，薄膜抗腐蝕性明顯提昇，阻抗(resistance)增強。此等特性亦與雷射之入射波長及功率有密切之關係。我們將這種以雷射輔助的PECVD製程稱之為LAPECVD( Laser-Assisted PECVD) 。本論文將對LAPECVD成膜條件與結果作一介紹與討論

第一章 前言……………………………………………………………….……..…2
第二章 CVD薄膜沉積與二氧化碳雷射基本原理………… ….…7
2-1薄膜沉積現象…………………………………………….…. …....7
2-2 PECVD之發展、特色與工作原理………………..……….….……..8
2-2-1 PECVD之發展與特色………………………………………….8
2-2-2 PECVD之工作原理………………………………….…………9
2-2-3 射頻PECVD沈積參數的影響……………………………...….12
2-3 雷射誘發反應CVD之發展、特色與工作原理………...…14
2-3-1 雷射誘發反應CVD之發展與特色……………….…..14
2-3-2 雷射誘發反應CVD中，二氧化碳雷射分解氣體
的機制…….…………..……………………………….……..17
2-3-3 雷射誘發反應沈積參數的影響………………..…….18
2-4 二氧化碳雷射基本原理……………………………………..…….……..21
第三章　實驗裝置與量測………………………….…………..…...………46
3-1 LAPECVD系統及實驗步驟………………………………..………….…..46
3-1-1 PECVD系統………………………………….……………….…46
3-1-2 光學系統…………………………………….……….…………48
3-1-3 LAPECVD 操作步驟……………………………………...49
3-2 雷射誘發反應CVD系統及實驗步驟………………………….……..….50
3-2-1 CVD系統…………………………………..……..………………51
3-2-2 光學系統…………………………………………..……..……….52
3-2-3 雷射誘發反應CVD實驗步驟………………….…………….53
3-3薄膜性質之分析與鑑定……………………….……………………….54
第四章以二氧化碳雷射LAPECVD法製備a-SiN:H及
SiO2膜及其特性分析…………..……………………….……….62
4-1 CO2雷射照射於矽基板時，所提升之基板溫度探討………………..62
4-2 以二氧化碳雷射LAPECVD法沉積非晶型氮化矽氫薄膜..….…64
4-2-1溫度對薄膜鍵結的關係………………………….………….……64
4-2-2不同基板溫度對薄膜折射率、厚度與蝕刻率的關係…………..66
4-2-3溫度對薄膜粗糙度之關係………………………………………..67
4-2-4 薄膜中氮及矽的比例……………………………….………..…..69
4-2-5 二氧化碳雷射譜線與成膜品質之關係………………….………69
4-3 以二氧化碳雷射LAPECVD法沉積二氧化矽薄膜………………72
4-3-1不同波長二氧化碳雷射對薄膜鍵結的關係………….72
4-3-2不同波長二氧化碳雷射對薄膜折射率、厚度、
蝕刻率與膜平整度的關係………….…………..……..74
4-3-3不同基板溫度對薄膜折射率、厚度、蝕刻率與電特性
的關係……………………………………………..…………...77
第五章 以二氧化碳雷射LICVD法製備SiO2及a-C:H膜及其特 性分析…………………………………………………….………………….100
5-1 以二氧化碳雷射誘發反應LICVD製備SiO2薄膜…..……100
5-2 以二氧化碳雷射誘發反應LICVD製備a-C:H薄膜.……………………………………………………..……..101
5-2-1 乙烯對二氧化碳雷射各波長之吸收強度分布..….101
5-2-2 沉積位置與成膜品質之關係………..………….…..102
5-2-3 沉積位置與成膜品質之關係………….………...….103
5-2-4 成膜過程中加入氫氣與薄膜品質之關係……...….105
第六章 結論……………………………………………………..……………....……116
第七章 參考文獻……………………………………..…..…………..……..119

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