臺灣博碩士論文加值系統

隨著消費性電子時代的來臨，高科技電子產品的需求逐年增加，而半導體產業所生產的積體電路更是消費性電子產品之關鍵零組件。在競爭激烈的市場中，企業為爭取新市場之市占率，皆致力於追求縮短生產週期時間以使新產品能夠快速的進入市場。而半導體產業製造過程複雜造成生產週期時間冗長且存在許多難以控制的變異，因此生產週期時間的改善與控管一直都是半導體產業相當重視的議題之一。
生產週期時間受到許多因素影響，在晶圓製造廠中建立許多指標並記錄大量製造資料，這些龐大資料很難直接應用在生產週期時間的改善。資料挖礦則是一種從大量資料中挖掘有意義規則的方法。本研究應用決策樹建構製造資料挖礦模型以分析半導體生產線上生產週期時間相關之因子，透過決策樹產出之IF-THEN規則檢視各因子對於生產週期時間之影響，並藉由調整與控制關鍵因子達到管理生產週期時間之目標。本研究以新竹科學園區某半導體晶圓廠為實證對象驗證模型之效度，透過決策樹分析實證對象之歷史資料，探討實證對象生產週期時間之問題，藉此找出生產線中對於生產週期時間影響顯著的因子，並根據決策樹之規則提出各因子之調控機制作為決策者管理生產週期時間之依據。根據實證研究結果顯示，實證公司生產週期時間問題，其影響最大的因子為機群以及平均機台效率，說明不同的機群應該分類管理，且針對重要的因子應予以控制避免生產週期時間惡化。並針對關鍵機群建立相關因子之調控機制，最後導入因子管制規則與改善建議以達到管理生產週期時間之目的。

目錄 IV
圖目錄 VI
表目錄 VII
第一章 緒論 1
1.1 研究背景 1
1.2 動機與重要性 1
1.3 研究目的 2
1.4 論文結構 3
第二章 文獻回顧 5
2.1半導體製造管理 5
2.1.1半導體製造之產業特性 5
2.1.2半導體產業特性對生產週期時間之影響 8
2.2半導體產業生產週期時間改善方法 10
2.3半導體產業生產週期時間相關指標 15
2.3.1生產週期時間相關因子 15
2.3.2設備使用時間狀態 18
2.4資料挖礦 21
2.5決策樹 24
2.5.1 CART 25
2.5.2 ID3、C4.5 26
2.5.3 CHAID 27
2.6半導體資料挖礦與製造智慧 29
第三章 半導體製造生產週期時間資料挖礦架構 30
3.1 問題定義 32
3.1.1定義生產週期時間相關因子 32
3.1.2架構因子影響關係 36
3.1.3輸入因子選定 38
3.2 資料準備 39
3.2.1 資料蒐集 39
3.2.2 資料預處理 39
3.3 資料挖礦模型 41
3.3.1 決策樹長樹 42
3.3.2 決策樹評估與修剪 43
3.3.3 規則萃取 43
3.4 結果解釋與應用 44
3.4.1建立全線生產週期時間管理規則 45
3.4.2建立重點機台生產週期時間管理規則 45
第四章 實證研究 46
4.1 問題定義 46
4.1.1定義生產週期時間相關因子 47
4.1.2輸入因子選定 49
4.2 資料準備 54
4.2.1資料蒐集 54
4.2.2資料預處理 58
4.3 資料挖礦模型 60
4.3.1 決策樹長樹 60
4.3.2 決策樹評估與修剪 62
4.3.3 規則萃取 62
4.4 結果解釋與應用 67
4.4.1建立全線生產週期時間管理規則 68
4.4.2建立重點機台生產週期時間管理規則 71
第五章 結論與未來研究方向 74
參考文獻 76

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