臺灣博碩士論文加值系統

在精密工程的發展上，微小化與精密化已經成為時勢所趨，在這發展方向的要求下，次微米級甚至奈米級的定位系統的需求量與日遽增。本文針對前述發展方向進行研究，以實現奈米級之平台定位能力為研究目標。
壓電材料由於具有體積小、反應快、機電轉換效率高與生熱少的優點，所以被大量應用在微定位系統的致動器上。現階段在壓電驅動的定位平台的研究上主要有三個方向，一是利用摩擦滯滑的現象，另一是尺蠖蟲形式的致動方式，最後一種則是採行材料變形的方式。前兩種方式的優點在於可以達到長行程的目的，第三種的方式則是有高定位精度的優點。
本文以實驗室之兩座壓電驅動精密定位平台(分別為串聯式XYZ三自由度微定位平台與並聯式XYZθXθYθZ六自由度微定位平台)於位移解析度方面上做進一步之分析與研究，將透過量測儀器的改善、系統架設的升級、以及量測訊號的處理，來達成平台位移解析度之提昇，並以量測出平台之奈米級最佳位移解析度為目的。
平台的量測實驗以雷射干涉儀、光纖感測器，及個人電腦加以整合，測試其性能，包括靜態與動態性能，運動精度及共振頻率等。

Precision positioning stages were widely used in many systems. This paper focuses on the development of precision positioning stages with nanometer resolution positioning.
Piezoelectric actuators（PZT）are popularly implied in actuators in micro-positioning systems due to it’s advantages of infinitely small, high speed, high electrical mechanical coupling efficiency and little heat generation. In general, three methods are used in development of micro-positioning systems. One is to the use of the stick-slip phenomenon, another is the inchworm type, and the third is the application of material elastic deformation. The first two can achieve long travel range, and the third one can realize high precision.
The precision positioning stages which included the serial 3-dof mechanism and the parallel 6-dof mechanism were analyzed, and studied in the displacement resolution. The stages’ displacement resolution needed to be promoted by upgrading measurement instruments, improving measurement environment, and processing measured signals. In general, the propose for this paper is to find the optimum displacement resolution.
Laser interferometer, Fotonic sensor and PC were combined to measure the performance of the system including the static and dynamic characteristics, resonance frequency.

目錄
致謝
中文摘要 I
英文摘要 III
目錄 IV
圖例目錄 VII
表格目錄 XI
第一章 前言 1-1
1.1 研究背景 1-1
1.2 文獻回顧 1-4
1.3 研究目標 1-8
第二章 實驗方法與實驗設備 2-1
2.1 實驗方法 2-1
2.1.1 實驗架構與方法 2-1
2.2 實驗設備 2-3
第三章 量測系統分析與研究 3-1
3.1 精密定位平台介紹 3-1
3.1.1 串聯式XYZ三自由度微定位平台 3-1
3.1.2 並聯式XYZθXθYθZ六自由度微定位平台 3-3
3.2 位移解析度量測分析 3-6
3.2.1 感測器雜訊之影響 3-6
3.2.1.1 光纖感測器作用原理 3-6
3.2.1.2 光反射面材料的選用 3-7
3.2.2 數位/類比訊號擷取卡解析度之影響 3-11
3.2.2.1 數位/類比訊號擷取卡的選用 3-11
3.2.3 其他因素之影響 3-13
3.2.3.1 訊號傳輸線之優劣 3-13
3.2.3.2 時間環境之影響 3-15
第四章 實驗量測 4-1
4.1 串聯式三軸平台之實驗結果整理 4-1
4.1.1 平台最大位移量測 4-2
4.1.2 電壓與位移關係 4-3
4.1.3 位移解析度之實驗結果與討論 4-7
4.1.3.1 單軸位移解析度量測 4-7
4.1.3.2 最佳位移解析度量測 4-8
4.1.3.3 不同訊號源之最佳位移解析度量測 4-10
4.1.4 軸間干涉誤差 4-12
4.1.5 奈米級軌跡圓之量測 4-15
4.2 並聯式六軸平台之實驗解果整理 4-18
4.2.1 量測實驗架設與方法 4-18
4.2.2 轉換矩陣 量測實驗整理 4-22
4.2.3 平台最大位移量測 4-26
4.2.4 電壓與位移關係 4-28
4.2.5 位移解析度之實驗結果與討論 4-31
4.2.5.1 單軸位移解析度量測 4-31
4.2.5.2 最佳位移解析度量測 4-33
4.2.6 軸間干涉誤差 4-35
4.2.7 奈米級軌跡圓之量測 4-38
4.2.8 動態量測實驗結果分析 4-41
第五章 結論與未來展望 5-1
文獻參考 R-1
附錄A 積層式壓電材料 A-1
A.1 壓電材料的基本性質 A-1
A.2 壓電材料組成律 A-4
A.3 機電轉換係數 A-5
A.4 積層式壓電致動器 A-8
附錄B LabVIEW程式圖 B-1
B.1 單軸致動_程式流程圖 B-1
B.2 串聯式三軸平台之圓軌跡致動_程式流程圖 B-2
B.3 並聯式六軸平台之圓軌跡致動_程式流程圖 B-3
作者簡歷

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