臺灣博碩士論文加值系統

滾輪壓印可連續複製微結構，是微結構元件主要的製造方法。但由於傳統的微結構滾輪製作方式是以電鑄鎳模包覆於滾輪上，滾壓時易產生模具翹曲與位移，加上剛性滾輪於滾壓時模具與基材僅有切線接觸，導致滾壓速度無法太快。因此本論文提出環形PDMS軟模結合氣囊滾輪來複製UV樹脂微結構於PC膜上，透過氣囊滾輪撐開外圍具有微結構的環形PDMS軟模，並施加壓力於滾輪軸上時，滾輪模具與基材間的接觸長度從原始的線接觸轉變為面接觸，能有效的提升滾壓時壓力的均勻度和微結構成型速度。
本研究首先將氣囊滾輪組件、施壓組件、移動平台組件和UV鹵素燈這四個單元結合，組立成一部氣囊滾輪紫外光樹脂滾壓機台。氣囊滾輪的製作方式是切削鋁合金啞鈴狀滾輪，外層包覆一撓性佳並具有高延展性的矽膠材料形成一個密閉腔體；環形PDMS軟模的製作方式主要利用大面積熱壓成型結合PDMS微鑄造技術將V溝微結構製作在環形PDMS軟模的外圍。
經感壓軟片實驗證實氣囊滾輪有效地增加滾輪與基材間之接觸長度與壓力均勻度，可增長曝光時間，與剛性滾輪滾壓結果比較，可大幅提升微結構成型速度。在適當之滾壓參數配合下即可成功地將V溝微結構完整且大面積的複製於PC基材上，結構轉寫高度與模具微結構相比，結構複製率可達87%。
本研究進一步將陽極氧化鋁 (AAO)奈米結構以微鑄造技術製作在環形PDMS軟模上，經自組裝的紫外光樹脂滾壓機台，成功地在PC塑膠基材製作奈米柱，有奈米柱之PC膜經表面接觸角量測儀分析後，接觸角度從原始的86.4°增加到108.1°，有效的增加表面疏水效果，其光學性能光譜儀反射率分析後發現在500nm的波長下反射率從原始的9%降至6%。本研究也將菲涅爾結構複製到PC膜上經由光強度計量測，聚焦後的光強度增加了三倍。

Replicating microstructure by roller imprinting is one of the most effective methods to produce the components with nano micro-structures on surface. However, there are two challenges: how to better prepare the roller mold and how to increase the contact area between roller and substrate. The contact between the rigid roller and the substrate is nearly a line; the brief contact prevent perfect replication at high rolling speed. On the other hand, the conventional method producing the microstructure on the roller mold is done by wrapping the electroplated Ni mold on the roller. Warp and deformation of mold easily occur during rolling imprinting.
In this research, a circular PDMS (polydimethylsiloxane) mold and a gasbag-roller imprinting facility are developed. The gasbag with controlled inner gas pressure is employed to sustain the circular PDMS flexible mold with microstructure. When a external pressure is applied on the shaft of gasbag-roller, the contact area between the roller and the substrate has been increased significantly from original line contact to area contact. This allows ample contact area and time between a gasbag-roller and substrate for the micro-structures on the mold to be completely replicated and cured.
With aid of pressure sensitive films, it is discovered that the combination of the gasbag-roller and the PDMS mold not only increases the contact area between roller and substrate, but also enhances the contact pressure over the contact area. The quality and speed of replication thus can be greatly improved. A V-cut microstructure has been fabricated on the circular PDMS mold by micro-casting, and used for the gasbag-roller sustained circular PDMS mold. Experimental result show that over a large operational window of inner gas and external pressures the replication can be perfect.
The imprinting facility and process have been employed to replicate AAO nanostructures on the PC film for antireflection and hydrophobic effect. The reflection has been droped from 9% in the bare PC film to 6% in the PC film with AAO nanostructures. The contact angle has increase from 86.4 o in the bare PC film to 108.1o in the PC film with AAO nanostructures. Fresnel microstructures are also replicated for the function of light-focusing. The light intensity has increased threefold as measured by the optical power meter. The results prove that an effective replication facility and process has been developed for fast and effective replication of micro- and nano-structures.

目錄 a
圖目錄 d
表目錄 h
第一章 導論 1
1.1前言 1
1.2 微熱壓成型製程 2
1.3紫外光固化壓印技術 2
1.4滾輪壓印成型 3
1.5滾輪模具製作技術 4
1.6大面積滾輪紫外光固化成型技術 5
1.7 研究方向與目標 6
1.8 論文內容與架構 7
第二章 文獻回顧 15
2.1紫外光固化壓印成型技術 15
2.2 滾輪應用於紫外光固化壓印成型技術 16
2.3 皮帶輪式滾壓成型技術 17
2.4 皮帶輪結合氣囊滾壓成型技術 18
2.5氣體輔助壓印成型技術 19
2.6 陽極氧化鋁奈米孔洞結構製作 21
2.7文獻回顧總結與研究創新 23
第三章 環形PDMS軟模結合氣囊滾輪製程開發與設計 35
3.1實驗目的及整體流程規劃: 35
3.2環形PDMS軟模結合氣囊滾輪製程介紹及機台開發 37
3.2.1 製程特色及原理 37
3.2.2 實驗機台設計及組裝 38
3.3 環形PDMS軟模製作 39
3.3.1 PDMS材料介紹 39
3.3.2 PDMS翻製微結構步驟 39
3.3.3 環形PDMS軟模製作流程 40
3.4其他相關材料備製 42
3.4.1基板 (Substrate) 42
3.4.2紫外光固化樹脂 (UV-curable resin) 42
3.5 PDMS環模結合氣囊滾輪複製UV樹脂微結構製程步驟 43
3.6 量測設備 44
3.7 本章結論 45
第四章 環形PDMS軟模結合氣囊滾輪複製UV樹脂微結構參數探討 61
4.1 氣囊滾輪與剛性滾輪的接觸長度以及連續滾壓時壓力均勻度 61
4.1.1 富士感壓軟片作用原理 61
4.1.2 氣囊滾輪與剛性滾輪之接觸長度比較 62
4.1.3 連續滾壓時壓力均勻度測試結果 63
4.2實驗參數規劃 64
4.3滾壓結果與討論 65
4.3.1 氣囊滾輪與剛性滾輪滾壓速度比較 65
4.3.2 滾壓速度對於微結構成型之影響 65
4.3.3微結構成型操作窗 66
4.3.4 氣囊內部壓力及外部施加壓力對微結構成型之影響 67
4.3.5 微結構複製之均勻性探討 68
4.3.6 PDMS環模強度對於微結構成型性探討 68
4.4結論 69
第五章 環形PDMS軟模結合氣囊滾輪複製AAO奈米結構的應用 88
5.1 製程特色 88
5.2 奈米結構滾壓轉印製程步驟 89
5.3.1 陽極氧化鋁(AAO)模具製作 90
5.3.2翻模法製作奈米結構PDMS環模 90
5.4奈米結構滾壓轉印之探討 91
5.4.1氣囊內部壓力與外部施加壓力對於奈米結構表面疏水性影響 91
5.5奈米結構對光學抗反射影響 92
5.5.1 奈米結構抗反射之原理 92
5.5.2 轉印結果與量測 93
5.6 本章結論 94
第六章 環形PDMS軟模結合氣囊滾輪複製菲涅爾結構的應用 107
6.1 製程特色 107
6.2 菲涅爾透鏡 108
6.3 菲涅爾結構滾壓轉印製程步驟 108
6.4菲涅爾結構PDMS環形軟模製作方法 109
6.5菲涅爾結構滾壓轉印之探討 109
6.5.1氣囊內壓與外壓對菲涅爾透鏡結構滾壓之光學聚焦強度影響 109
6.6 本章結論 110
第七章 結論與未來研究方向 118
7.1 研究成果總結 118
7.2 未來應用研究方向與展望 119

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