臺灣博碩士論文加值系統

半導體製造業是一種要求高精密度且技術密集的工業，昂貴的
生產設備佔所有生產成本的50%以上，且在八吋晶圓廠之設備折舊
成本佔生產成本約70%，然而生產設備能否正常運作直接影響半導
體製造的產量、良率與品質，目前國內半導體製造設備故障維修雖
有維修手冊，但相關的經驗仍屬於工程師或專家的個人經驗知識，
使得許多經驗與知識無法傳承下來，另一方面，半導體製造設備種
類多、精密度高等因素亦增加了故障維修上的複雜度。
因此，本研究針對半導體製造設備故障維修上的問題，建立一
半導體製造設備故障維修專家系統架構，並針對此架構以物件導向
方法(Object-Oriented Method)為基礎，來發展知識擷取介面。並
且使用EXSYS專家系統發展軟體，以蝕刻機為例發展一實際之知識
擷取介面，此知識擷取介面的優點，為將半導體製造設備上複雜的
故障維修知識加以分類做有系統的歸納，同時，使得最終使用者可
以從中得到故障維修上的正確資訊，因而改善設備可靠度、可維護
度、可操作度，提昇設備有效使用率及生產能力，以及提供半導體
故障維修專家系統的發展與修正的參考依據。

Semiconductor manufacturing requires high precision
equipment and intensive technology. The cost of the
expensive and assorted equipment is more than 50% of all
production cost (the proportion is more than 70% for
8-inch fabs). Besides, the conditions of machines will
directly affect the capacity, quality, and yield. Thus,
the maintenance of equipment is very important in the
semiconductor manufacturing. Although the equipment
vendors usually provide maintenance manual, experienced
experts are required for the maintenance work. However,
due to fast development of technology in semiconductor
manufacturing, experts’ or engineers’ experiences and
knowledge are not easy to be conveyed. Hence, this
research is to develop an equipment maintenance expert
system for the semiconductor manufacturing industry.
In this thesis, a conceptual structure of the
maintenance expert system is constructed first.
Followed is the development of knowledge acquisition
interface module of this expert system by using
object-oriented method. The objective of developing
this module is to provide user a simple and easy way
to classify the maintenance knowledge efficiently and systematically. Finally, a practical example is
presented to show the construction of the knowledge
acquisition interface by using EXSYS software.

第一章　緒論
1.1研究背景與動機
1.2研究目的
1.3研究範圍與限制
第二章 文獻探討
2.1半導體製造設備簡介
2.2專家系統簡介
2.3設備故障維修專家系統
2.4知識擷取技術
2.5物件導向技術
2.6物件導向系統發展的方法
第三章 系統架構與研究方法
3.1研究架構與流程
3.2設備故障專家系統架構之發展
3.3專家系統知識擷取介面之發展
第四章 實例驗證─以蝕刻機為例
4.1專家系統發展軟體簡介
4.2系統實作-以蝕刻機故障為實例
第五章 結論與未來研究方向
5.1結論
5.2未來研究方向
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