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Micro-fabrication technology is the main method when
developing micro mach-ine. Especially, more and more materials
of high capability were been designednowadays. The traditional
mechanical cutting methods become hard to work. The Electrical
Discharge Machining(EDM) is a kind of non-traditional machining.
Itmelts the metal by sparks in a narrow area, therefore, It cuts
the metal no matter how hard or strong the matel is. This
character makes EDM very suit todo the developing of micro
machining technology. However, a CNC micro machine spends
serveral million dollars. Most people or companies can't affort
it. This experiment tries to re-design the electric circule of a
traditional NC EDM machine according the characters of micro
EDM, and design the machanism to make the machine can do
3-dimensional machining by computer's control. This thesis using
the self-designed machine to make Micro EDM experiments. In the
experiment, we find the Micro EDM characters when pure cu is
electrode and WC is workpiece. We product many kinds of micro
electrode (circular rod, square rod, polyg onal rod). The deep
hole is hard to make in the micro area. We find out the Micro
EDM char-acters when WC is electrode and Ti-6Al-4V is workpiece,
then using the just produced micro electrode to drill a micro
deep hole. Electrode making and drill deep hole in the same
machine can avoid harmful the micro electrode and enhance the
accurancy. We produce the φ20 μｍ and radius-longitude ratio
14's deep micro hole.
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