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Abstract The cleanroom environment is the required area to develop the modern indus trial products. It plays a key role for the precision industry-produc design a nd fabrication technologies. The research integrates mechatronic engineering - based knowledge to create a clean room engineering design with safety man agement course. The course contains the clean room specifications, t he engineering design standards, the contamination prevention and contro l technologies, the safety management, and some relative industry invest igations. The research results are published in the network of Internet and Wo rld Wide Web to enhance the modern advanced engineering education.
It is important to monitor the room cleanliness and to analyze the contaminated particles for high-class t echnical industry, because to keep the suitable clean room condition is a ke y for developing the precision fabrication processes. The research does setu p a particle measurement with analysis system. It used to detect the clean ro om cleanliness and to determine the relative contamination and indication species that applies thtechnologies of machine vision and image processing wi th some software and hardware design. To make sure the system work function is right, the systemdetected data have compared with the data from the commercia l laser particlcounter. The research will be published in the computer network that may dosome contribution in the education of the advanced clean room engi neering and the particle detection engineering.
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