臺灣博碩士論文加值系統

Hartmann-Shack量測法原本主要用於量測天文中大氣擾動所引起的波前像差或人眼像差，因人眼像差量測須考量到是否會影響人體健康等風險性，為了避免人眼量測風險，本文以透鏡作為待測物，因Hartmann-Shack量測系統且具有高精確度與高穩定度等優點存在，所以本篇論文將以Hartmann-Shack量測系統為基礎進行波前像差重建與探討。

Hartmann-Shack波前系統主要用於量測波前像差，本論文以Throlabs WFS系列的波前感測器為設計基礎，可感測之微透鏡數量為31x31個，以光學模擬軟體Zemax模擬整套Hartmann-Shack量測系統，並於量測系統中加入適當的待測透鏡，重建Zernike係數與波前像差，最後進行誤差分析，本文波前重建誤差PV值為10-2λ，RMS為10-3λ。由於調製轉換函數值(MTF)為評價光學系統優劣的重要指標，因此本文將利用波前像差重建光學系統的光學傳遞函數(OTF)與調製傳遞函數，探討光學系統解析能力。最後為了驗證Hartmann-Shack量測系統演算法，將實際架設量測系統進行波前重建，並將因人為架設誤差Tilt像差消除，其重建精度PV值約為10-3λ與RMS為10-5λ。

Hartmann-Shack method was originally used for measuring the wavefront caused by astronomical atmospheric disturbances and aberrations of human eye. Due to measure human eye aberration must consider the risks whether it will affect human health, so this thesis use lens to replace eyes. Because Hartmann-Shack sensors has high accuracy and stability, so this thesis will expolore the measurement method on the basis by Hartmann-Shack wavefront sensors.

The Hartmann-Shack sensors mainly used for measuring wavefront aberrations, so the design basis refers to WFS series of Throlabs, the number of micro-lens that can sensing are 31x31. This thesis use optical simulation software Zemax to design a Hartmann-Shack wavefront system, and simulate lens to reconstructe the Zernike coefficients and wavefront aberration. The wavefront reconstruction errors PV value is 10-2λ and RMS is 10-3λ. The modulation transfer function (MTF) is an important indicator for evaluating the optical system, therefore this thesis use wavefront to reconstructe optical transfer function (OTF) and the modulation transfer function, and explore the resolving power of the optical system. Finally, in order to verify the Hartmann-Shack algorithm, this thesis will set up the measurement system for wavefront reconstruction and analysis, and eliminate Tilt aberrations cause by artificial erection error, the reconstruction accuracy PV value is about 10-3λ and RMS is 10-5λ.

目錄

目錄

中文摘要...................................................i
英文摘要..................................................ii
致謝......................................................iv
目錄.......................................................v
圖目錄..................................................viii
表目錄....................................................xv
第一章 緒論...................................................................................................................1
1.1 發展史.....................................................................................................1
1.2 市場概況.................................................................................................2
1.3 研究動機.................................................................................................3
1.4 研究目的.................................................................................................4
1.5 論文架構.................................................................................................5
第二章 像差理論與波前像差重建原理.....................................................................6
2.1 像差理論..................................................................................................6
2.2 單色像差..................................................................................................7
2.2.1球面像差.........................................................................................7
2.2.2彗差.................................................................................................9
2.2.3像散...............................................................................................10
2.2.4場曲...............................................................................................11
2.2.5畸變...............................................................................................12
2.3 波前與光程差.......................................................................................13
2.4 Zernike多項式......................................................................................14
2.5 Hartmann-Shack量測系統重建原理…...............................................19
2.6 Hartmann-Shack波前量測系統結構…..............................................21
第三章 Zonal重建法探討與分析............................................................................23
3.1 Zonal重建法重建原理............................................................................23
3.2重建影像感測器上光點分布...................................................................27
3.3 Zonal重建法重建Zernike係數與波前像差……..................................31
第四章 Modal重建法探討與分析............................................................................36
4.1 Modal重建法重建原理............................................................................36
4.2 Modal法重建點光源波前像差................................................................41
4.3微透鏡陣列數量與重建精度分析............................................................44
4.4 Modal重建法重建含Zernike Phase透鏡之波前像差…........................49
第五章 波前像差重建調製傳遞函數.......................................................................53
5.1光學系統演進............................................................................................53
5.2廣義出瞳函數............................................................................................55
5.3重建點擴展函數........................................................................................56
5.4重建光學傳遞函數....................................................................................59
5.5重建調制轉換函數....................................................................................62
第六章 模擬Hartmann-Shack量測系統..................................................................66
6.1 擴束透鏡原理探討...................................................................................66
6.2擴束透鏡原理與模擬設計........................................................................69
6.3大光屈度透鏡量測系統探討....................................................................74
6.4重建大光屈度透鏡量測系統Zernike係數與波前像差.........................75
6.5小光屈度透鏡量測系統探討...................................................................79
6.6重建小光屈度透鏡量測系統Zernike係數與波前像差.........................80
第七章 實驗架設與量測分析...................................................................................85
7.1 Hartmann-Shack量測系統元件規格.....................................................85
7.2重建點光源波前像差...............................................................................89
7.3重建待測透鏡波前像差….......................................................................93
第八章 結論.................................................................................................................99
參考文獻.................................................101
附錄.....................................................103
A 後記...................................................105
B 2011 IPC研討會論文....................................108
C 第12屆全國AOI論壇與展覽...............................111

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