臺灣博碩士論文加值系統

由於壓電材料具有高的機電轉換特性，所以常用於致動器與感測器上，本研究為利用自製的壓電薄膜來設計一款能多點偵測的音洩波感測器，選用的壓電薄膜是利用水熱法來製作鋯鈦酸鉛壓電陶瓷薄膜，厚度約20μm，具有一定的彎曲性可貼合感測表面，利用蝕刻鈦基材的方式可以使得壓電層形狀更符合需求，再加入自製感測結構的部分，使得感測器能更貼合感測物，提高偵測訊號之靈敏度。
在感測結構的部分，我們使用了鋁珠結合了感測器，鋁珠具有較輕的重量方便我們固定於感測面上，確認是否能使感測器更加貼合感測物表面，除了感測訊號之外；可以使用加熱水凝膠的方式，達到臨界溫度時的特性，方便我們給予皮膚藥品。
最後我們把感測器實際運用在人體膝蓋與手腕上做訊號量測，因為當人體運動時，骨頭磨擦會發出音洩波的訊號，藉此觀察人體的運動狀況；當應用於手腕上面時，觀察訊號的規律性希望能看出脈搏跳動已觀察心跳及脈象。

This research presents a multifunctional and stretchable smart patch. This patch contains the piezoelectric (PZT film) node array for sensing acoustic emission (AE) wave and thermally activated PNIPAM nodes for delivering drug. The PZT sensing node array is realized on a thin flexible titanium sheet with serpentine network electrically connected. This design has two novelties: (1) the serpentine network allows the node array to stretch in an arbitrary planar direction; (2) the normal force of AE detection head coupling to the sensing object can be enhanced while the patch stretched. The thermal actuator and temperature controlled drug release module both fabricated with PNIPAM is also reported for the first time.

目錄
第一章 緒論 1
1.1前言 1
1.2研究動機與目的 2
1.3文獻回顧 4
1.3.1 水熱法 4
1.3.2 壓電材料 5
1.3.3 音洩波介紹 8
1.3.4 PNIPAAM熱致動器 10
1.3.5 伸縮式架構 11
1.4 本文架構 13
第二章 音洩感測器元件設計與製程 14
2.1 元件設計 14
2.2 壓電薄膜的製作 16
2.2.1 壓電薄膜生長機台 16
2.2.2 基材選定與蝕刻 17
2.2.3 前驅液調配 19
2.2.4 水熱法製作壓電薄膜 22
2.2.5 元件電極製作與極化 23
2.3 感測結構製作 25
2.3.1 感測器材料選擇 25
2.3.2 PNIPAAM水凝膠製作 28
2.4自製伸縮銅導線 32
2.5 PDMS翻模 34
2.6元件組合與封裝 35
第三章 實驗架設與結果 38
3.1 壓電薄膜震動測試 38
3.1.1上下十字交錯銀電極層 38
3.1.2單面鍍滿電極層 41
3.2 鉛筆筆尖斷裂AE感測 48
3.2.1 感測點之邊界條件測試 48
3.2.2 鉛筆筆尖斷裂(AE)實驗架構 51
3.3 PNIPAAM水凝膠給水測試 55
3.4元件可拉伸之特性展示 61
第四章 感測器應用 68
4.1人體膝蓋感測應用 68
4.2脈搏訊號量測 76
4.3 跑步機訊號感測 79
第五章 結論與建議 88
5.1結論 88
參考文獻 89
附錄一(使用儀器) 93
附錄二(使用藥品) 94

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