臺灣博碩士論文加值系統

本論文以梅森等效電路(Mason Equivalent Circuit)為出發點，探討薄膜體聲波共振器(Thin Film Bulk Acoustic Wave Resonator, FBAR)、固嵌式共振器(Solidly Mounted Resonator, SMR)、層疊晶體濾波器(Stacked Crystal Filter, SCF) 以及耦合共振濾波器(Coupled Resonator Filter, CRF)的工作原理，並且利用傳輸矩陣法(Transmission Matrix Method)計算元件之散射特性，更進一步的模擬以及評估各種材料尺寸參數對元件頻率響應的影響。此外，針對反射器的應用以及反射器體聲波的頻率響應也有做更進一步的分析。模擬的結果顯示，經過適切的設計，體聲波元件可以用於設計符合無線通訊應用的共振器與濾波器。

In this thesis the frequency response of Thin Film Bulk Acoustic Wave Resonator (FBAR), Solidly Mounted Resonator (SMR), Stacked Crystal Filter (SCF), and Coupled Resonator Filter (CRF) are investigated by using the transmission matrix method.
The effects of material properties on the scattering characteristic are also discussed. Besides, the applications of reflectors and the frequency response of bulk wave devices with reflector layers will also be studied.
Simulation results show that with a proper design bulk acoustic wave devices can be employed to design resonators or filters for wireless communications applications.

目 錄
頁數
中文摘要 ............................................................. I
英文摘要 ............................................................. II
表目錄 ................................................................. VI
圖目錄 ................................................................. VIII
第一章 緒論 ....................................................... 1
1.1研究背景 ....................................................... 1
1.2研究動機 ....................................................... 4
1.3研究目的 ....................................................... 5
第二章 FBAR之分析與設計 ............................. 6
2.1結構分析 ....................................................... 6
2.2理論分析 ....................................................... 8
2.2.1 質子運動與聲波的產生 ............................... 8
2.2.2 梅森等效電路 ......................................... 10
2.2.3 TFR元件之阻抗 ....................................... 12
2.2.4 機電耦合係數與電容比 ............................... 13
2.2.5 傳輸矩陣法 ............................................. 15
2.2.6 等效電路法 ............................................. 20
2.3 FBAR參數分析與最佳化設計 ............................. 22
2.3.1 壓電薄膜共振器 ....................................... 23
2.3.2 薄膜體聲波共振器 ................................... 25
2.3.3 基板對於TFR之影響 ................................. 30
2.3.4 等效電路之應用 ....................................... 33
2.3.5 FBAR最佳化設計結果 ................................. 38
2.3.6 FBAR之聲場分佈 ..................................... 39
第三章 SCF與CRF ........................................... 44
3.1 結構分析 ....................................................... 44
3.2 SCF與CRF之傳輸矩陣分析 ............................... 46
3.3 SCF之等效電路與各參數分析 ........................... 48
3.3.1 SCF之等效電路 ....................................... 48
3.3.2 SCF各參數分析討論 ................................... 56
3.3.3 N-pole SCF ............................................. 59
3.3.4 設計與模擬結果 ....................................... 61
3.3.5 SCF之聲場分佈 ....................................... 62
3-4 CRF與耦合層 ................................................. 64
3.4.1 CRF之結構 ............................................. 64
3.4.2 耦合層之參數分析 ..................................... 67
3.4.3 設計與模擬結果 ........................... 72
第四章 SMR分析 ............................................. 73
4-1結構分析 ....................................................... 73
4-2模擬分析 ....................................................... 76
4-3反射器參數模擬與分析 ..................................... 80
4.3.1反射器之面積分析 ..................................... 80
4.3.2反射器之層數分析 ..................................... 84
4.3.3反射器之材料分析 ..................................... 88
4.3.4反射層之厚度調變 ..................................... 91
4.3.5設計與模擬結果 ..................................... 96
第五章 結論與未來展望 ................................... 98
參考文獻 ............................................................. 100

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