臺灣博碩士論文加值系統

中 文 摘 要
精密定位技術是製造產品、測量物體尺寸、運轉各種機器之機械工程上的重要技術之一。隨著精密工程的不斷進步，不論是半導體產業、精密機械工業、生物細胞領域、光電系統、顯微機構、表面工程、STM、SPM等方面，皆朝微小化、精密化的方向前進，因此對於微米或次微米級的定位系統需求量日增。另一方面，具有機電轉換力的壓電材料（Piezoelectric Material），以其質輕、體積小、反應快、解析度高等特性已逐漸被注意，但由於遲滯現象（Hysteresis）及輸出位移的限制，其應用大部分侷限在感測器（Sensors）上只有少部分使用於致動器（Actuators）方面，但近年來由於壓電材料在材料性質的改進和積層式壓電陶瓷的開發，使得壓電材料能在低輸入電壓的驅動下有較高的位移輸出，更適於致動器的用途。
本文的研究目的為利用壓電材料作為致動器設計一用於掃描式穿隧顯微鏡上的精密定位平台，對於其壓電致動器做一探討研究，配合其壓電致動器之特性，設計一開迴路控制系統。
本文在設計上將設計一單自由度進給裝置與三自由度微動裝置，利用雙裝置整合方式來達成精密微動定位的目標，單自由度進給裝置主要是採用驅動位移量較大的壓電材料尺蠖蟲式（Inchworm）驅動設計，其解析度為＜40 nm；三自由度微動裝置是利用管狀的壓電材料作為驅動源。本文利用光槓桿法與光干涉法-麥克遜干涉儀來從事壓電致動器的位移量測和特性探討。

ABSTRACT
Recently, the needs for precise micropositioning aries in many fields of research and technology, such as in cellular biology, and SXM(scanning tunneling microscopy or scanning probe microscopy). The requirement of positioning system with submicron order accuracy increases with the development of precision engineering. In this field, the piezoelectric (PZT) material is remarkable in submicron positioning systems for its merits in electromechanical couple. The features of the PZT material, such as less weigh, small size, fast reponse, high resolution, etc., have made it valuable for application in position engineering. However, there are some disadvantages of the PZT devices. The displacement precession of the PZT devices is limited by the hysteresis phenomenon. In addition, the maximum deformation for a piece of PZT material is quite small for most application. In order to improve these properties, the new compositions of the PZT material and multiplayer PZT ceramics have been development in recent years. The reformed PZT devices with these reformed PZT elements may obtain greater displacement and higher precision.
In this work, the characteristics of PZT actuators are investigated for its applicability in the scanning tunneling microscope (STM) system. The results are used to establish a high precession positioning stage for STM system. The positioning stage consists of a coarse stage and a three-axis micropositioner. The coarse stage is driven by an InchwormR motor (New Focus Inc.), which has s minimum resolution of 40 nm. The three-axis micropositioner is based on a PZT tube (PZT-5H). The displacement of the high precession positioning stage was measured by using the Optical lever method and the Michelson interferometer method in order to study the hysteresis characteristics as well as the displacement —voltage relation of the micropositioner.

目 錄
封面內頁
簽名頁
上網授權書………………………………………..…………………iii
授權書………………………………………………………………..iv
中文摘要………………………………………………………………v
英文摘要………………………………………….…………………vii
誌謝……………………………………………….………………… ix
目錄……………………………………………….………………… xi
圖目錄…………………………………………….………..……… xiii
表目錄……………………………………………...….……………xvi
符號表…………………………………………………………...…xvii
第一章 緒論………………………………………………….……..1
1.1研究背景……………………………………………………….1
1.2文獻回顧………………………………………………………..2
1.2.1微定位平台………………………………………..……….2
1.2.2掃描穿隧型顯微鏡………………………………………...5
1.3 研究目的與預期成果…………………………………………6
第二章 壓電材料原理………………………………………….....8
2.1壓電材料之簡…………………………………………………..8
2.2壓電材料組成律……………………………...…………......16
2.3壓電諧振體……………………………………………………18
2.4壓電特性參數…………………………………………………19
第三章 系統組成設計與配置……………………………….….23
3.1 設計流程規劃………………………………………………..23
3.2組成系統之設計………………………………………………23
3.2.1單自由度進給裝置……………………………….……...24
3.2.2三自由度微動裝置……………………………….……...30
3.3 組成系統之整合……………………………………………..36
第四章 實驗量測………………………………………………....38
4.1 實驗儀器……………………………...……………………...38
4.2實驗原理與方法………………………………………………39
4.2.1實驗原理………………………..………………………...40
4.2.1.1光槓桿法……………………………………………..40
4.2.1.2光干涉法……………………………………………..42
4.2.2實驗方法………………………………………..………...51
4.2.2.1光槓桿法實驗量測…………………………...……..51
4.2.2.2麥克遜干涉儀實驗量測………………………...…..55
4.3 實驗結果整理與討論………………………………………..58
4.3.1單自由度進給裝置……………………………………….58
4.3.2.三自由度微動裝置………………………………………59
4.3.2.1光槓桿法實驗………………………………………..60
4.3.2.2光干涉實驗-麥克遜干涉儀實驗……………………61
第五章 結論與未來展望………………………………………...79
參考文獻……………………………………………………………81
附錄………………………………………………………………….87

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