臺灣博碩士論文加值系統

本研究主要為發展創新型彩色差動共焦之三維形貌量測技術與系統，一般現行的差動共焦技術，乃將兩個感測器元件放置在焦點前後之光學架構進行差動共焦量測，由於CCD的偏位擺設位置方式使得兩組CCD的量測範圍產生差異，易於造成系統的水平量測範圍與水平解析同時降低，使得差動共焦量測在線上即時量測的應用性降低，一般而言，僅適用於單點式雷射共焦量測，對於線型掃描或寬頻光共焦量測方式，此方式應無法正常量測。因此本研究提出一種創新式差動共焦量測方法，以線型連續多波長光源並結合軸向色散物鏡、兩組不同寬度的線光源與兩組彩色線型光感測裝置之共焦量測架構，發展一種即時線型掃描彩色差動共焦量測技術。提出量測之系統為達差動共焦效果，光源部份以一組光源經由光纖一分為二，並在兩個光纖出口的前方放置大小不同的線型狹縫；兩道光源透過軸向色散物鏡聚焦至物體表面並反射，再透過兩組彩色線型光感測器來量測大小不同的狹縫的反射光。此兩反射光的訊號具有不同全寬半高值的RGB三顏色的強度反應曲線，將此光強度反應曲線經由正規化差動共焦運算，以分別求得RGB三色光的強度比值與量測深度的關係曲線，以此曲線為依據來進行型貌量測深度資訊之重建。所提出之差動共焦運算可將物體表面反射率的參數影響消除，量測重建時可有效抑制物體表面不均勻的反射率的影響。研究在一個量測系統的實例上，使用綠色光之軸向色散物鏡搭配雙狹縫架構，其深度量測範圍可達到45um，量測速度可比一般彩色共焦量測速度高數十倍以上。

This study presents a broadband differential confocal surface profilometer using novel double-slit chromatic confocal measurement for in-situ high-speed microscopic surface inspection. In-situ automatic optical inspection (AOI) on microstructures has become extremely important to ensure manufacturing quality. The conventional laser differential confocal techniques employ two line detectors to be placed in the front and rear of the image focusing plane for producing differential confocal phenomenon. For broadband chromatic confocal measurement, the above optical layout could bring misalignment errors and reduce measuring field of view (FOV). Therefore, a multi-wavelength differential confocal surface profilometer is developed by employment of a novel concept of using double slits for generating the differential gradient in confocal measurement. In the optical configuration, two different sizes of slits with individual opening sizes are placed in front of their corresponding imaging unit and designed to conjugate with the tested object surface. A chromatic microscopic objective based on various glass refractivity and shape curvatures is designed to disperse the two incident lights having an orthogonal polarization relationship into a vertical measuring range. The differential gradient is generated by correlating two depth response curves (DRC) which are measured by the two imaging units with their corresponding slits. A depth-focus response curve can be further established by a system calibration using standard step-height targets. The developed system can be used to measure the profiles of microstructures by one shot inspection without any vertical scanning required by conventional confocal measurement. The vertical measurement range can be designed for a range of a few hundreds of micrometers while its vertical resolution is capable of reaching down to 0.1 micrometers. The repeatability of the developed method can reach to 0.1 ?m within one standard deviation. Especially, the differential confocal principle developed is capable of measuring various surfaces having highly different surface reflectivity. The measuring speed can significantly break the limit of the traditional chromatic confocal methods and reach to the maximum speed of a line imaging unit.

摘要 i
ABSTRACT iii
本論文之智慧財產權利歸屬 v
誌謝 vi
目錄 vii
表目錄 ix
圖目錄 x
第1章 緒論 1
1.1 研究背景 1
1.2 研究動機與目的 2
1.3 研究之創新性 4
1.4 論文架構 5
第2章 文獻回顧 6
2.1 引言 6
2.2 共焦量測原理 7
2.3 共焦量測系統文獻 8
2.4 文獻回顧之結論 18
第3章 系統量測原理與技術 21
3.1 單點型共焦量測系統 21
3.2 線型共焦量測系統 25
3.3 彩色共焦量測系統 28
3.3.1 光譜軸向色散之原理 28
3.3.2 彩色共焦量測原理 31
3.4 彩色差動共焦量測系統原理與架構 33
3.4.1 量測系統原理 34
3.4.2 光學量測系統架構 38
第4章 量測系統之驗證與結果分析 46
4.1 光源與彩色CCD裝置之光強響應誤差校正 46
4.2 狹縫大小與量測之深度範圍測試 50
4.3 量測系統之像素對位 53
4.4 重複性量測之測試 56
4.5 工業樣品之實例量測與比較 58
4.5.1 標準塊規量測實例一 59
4.5.2 標準塊規量測實例二 61
4.5.3 微凸塊量測 63
4.5.4 量測結果之分析與討論 66
第5章 結論與未來展望 67
5.1 結論 67
5.2 未來展望 68
參考文獻 69
附錄A 72

[1]張奕威，多波長差動共焦顯微三維形貌量測技術之研究，博士論文，國立臺北科技大學機電科技研究所，臺北，2012。
[2]陳昭男，彩色共焦顯微三維形貌量測術之研發，碩士論文，國立臺北科技大學自動化科技研究所，臺北，2009。
[3]M. Minsky, "Microscopy Apparatus," U.S. patent, No. 3,013,467, 1961.
[4]T. Tanaami, S. Otsuki, N. Tomosada, Y. Kosugi, M. Shimizu and H. Ishida, "High-speed 1-frame/ms scanning confocal microscope with a microlens and Nipkow disks," Applied Optics, Vol. 41, Issue 22, 2002, pp. 4704-4708.
[5]M. Ishihara and H. Sasaki, "High-speed surface measurement using a nonscanning multiple-beam confocal microscope," Optical Engineering, Vol. 38, Issue 6, 1999, pp. 1035-1040.
[6]F. Bitte, G. Dussler and T. Pfeifer, "3D micro-inspection goes DMD," Optics and Lasers in Engineering, Vol. 36, Issue 2, 2001, pp. 155-167.
[7]http://www1.cs.columbia.edu/CAVE/projects/pi_micro/pi_micro.php
[8]S. K. Nayar and Y. Nakagawa, "Shape from focus: an effective approach for rough surfaces," Robotics and Automation, 1990. Proceedings., 1990 IEEE International Conference on, Vol. 2, 1990. pp.218-225.
[9]C. H. Lee and J. P. Wang, "Noninterferometric differential confocal microscopy with 2-nm depth resolution," Optics Communications, Vol. 135, Issue 4-6, 1997, pp. 233-237.
[10]K. B. Shi, P. Li, S. Z. Yin and Z. W. Liu, "Chromatic confocal microscopy using supercontinuum light," Optics Express, Vol. 12, Issue 10, 2004, pp. 2096-2101.
[11]K. Shi, P. Li, S. Yin and Z. Liu, "Surface profile measurement using chromatic confocal microscopy," Vol. 5606, 2004. pp.124-131.
[12]A. K. Ruprecht, K. Korner, T. F. Wiesendanger, H. J. Tiziani and W. Osten, "Chromatic confocal detection for high Speed micro topography measurements," Proceedings of SPIE, Vol. 5302, 2004. pp.53-60.
[13]P. C. Lin, P. C. Sun, L. J. Zhu and Y. Fainman, "Single-shot depth-section imaging through chromatic slit-scan confocal microscopy," Applied Optics, Vol. 37, Issue 28, 1998, pp. 6764-6770.
[14]J. Kim, D. Kang and D. Gweon, "Spectrally encoded slit confocal microscopy," Optics Letters, Vol. 31, Issue 11, 2006, pp. 1687-1689.
[15]P. S. Toh, "Confocal Imaging", U.S. patent, No. 6,838,650, 2005.
[16]C. J. R. Sheppard and X. Q. Mao, "Confocal microscopes with slit apertures," Journal of Modern Optics, Vol. 35, Issue 7, 1988, pp. 1169-1185.
[17]T. Wilson, S. J. Hewlett and C. J. R. Sheppard, "Use of objective lenses with slit pupil functions in the imaging of line structures," Applied Optics, Vol. 29, Issue 31, 1990, pp. 4705-4714.
[18]T. Wilson and C. J. R. Sheppard, "Theory and Practice of Scanning Optical Microscopy," 1984, Academic, London.
[19]A. Mac Raighne, J. Wang, E. McCabe and T. Scharf, "Variable-focus microlenses: Issues for confocal imaging," Vol. 5827, 2005. pp.12-22.
[20]H. J. Tiziani, R. Achi and R. N. Krämer, "Chromatic confocal microscopy with microlenses," Journal of Modern Optics, Vol. 43, Issue 1, 1996, pp. 155-163.
[21]H. J. Tiziani and H. M. Uhde, "Three-dimensional image sensing by chromatic confocal microscopy," Appl. Opt., Vol. 33, Issue 10, 1994, pp. 1838-1843.
[22]朱士維，「光學顯微技術的新進展」，台大物理系系刊《時空》，第三十一期，2008，第76-81頁。
[23]E. Dusch, T. Dorval, N. Vincent, M. Wachsmuth and A. Genovesio, "Three-dimensional point spread function model for line-scanning confocal microscope with high-aperture objective," Journal of Microscopy-Oxford, Vol. 228, Issue 2, 2007, pp. 132-138.
[24]H. Perrin, P. Sandoz and G. M. Tribillon, "Profilometry by spectral encoding of the optical axis," Vol. 2340, 1994. pp.366-374.
[25]http://zh.wikipedia.org/wiki/%E7%A8%9C%E9%8F%A1
[26]C. S. Joseph, G. G. Jérôme and C. J. Pierre, "Quasi Confocal Extended Field Surface Sensing," Proceedings of SPIE, Vol. 4449, 2001. pp.178-183.
[27]http://www.edmundoptics.com/