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研究生:林靜怡
研究生(外文):C.I. Lin
論文名稱:高科技廠房之無塵室設計分析探討
論文名稱(外文):Investigation of System Design for High-Tech Industrial Cleanrooms
指導教授:王輔仁王輔仁引用關係
指導教授(外文):F.J. Wang
學位類別:碩士
校院名稱:國立勤益科技大學
系所名稱:冷凍空調系
學門:工程學門
學類:其他工程學類
論文種類:學術論文
論文出版年:2008
畢業學年度:96
語文別:中文
論文頁數:101
中文關鍵詞:無塵室系統設計驗證
外文關鍵詞:CleanroomSystem designValidation
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舉凡與現代人生活緊密相關的物品,皆有由無塵室中生產的產品,例如食品、藥品與高科技產品像是電腦中的晶片、液晶螢幕…等,是由無塵無菌室中製作生產,為了因應科技日新月異的需求,無塵室的應用經過二十餘載的演化,而發展出不同的系統設計;然而,能源短缺的時代來臨,無塵室系統設計的良莠,深深影響系統耗能的高低,尤其是工業用無塵室其規模與耗能,遠大過應用於食品與藥品之無塵無菌室,因為高科技產品需於高規格之無塵室中產出。
因此,本研究係針對高科技產業之工業用無塵室為主要對象,經由歷史文獻與設計案例的蒐集,以宏觀的角度,透視設計的結構與整體性,作全盤性的歸納與逐步解析,建置無塵室設計架構之流程與方法,並透過實際設計案例的分析與探討,最後經由無塵室的量測,驗證系統設計的有效性與完整度,將提供無塵室設計或工程人員,在無塵室規劃中,有效的污染控制機制。
“Cleanroom” has been very close to each one of us. Most of things we live with in our daily life may be produced from the cleanroom, for example, food, medicine and high-tech products such as like computer chips and LCD monitors. In order to fulfill various demands, cleanroom applications have been developing to various system designs in the past 20 years’. However, under the coming energy shortage crisis, the quality of cleanroom design will have profound impact to of energy consumption system, especially for industrial cleanroom which scale and energy consumption are much higher than bio-cleanroom applied in food or pharmaceutical industrials, which can only be produced from very high standard cleancrooms.
Therefore, this research aims to take high tech industrial cleanroom as the target and intends to investigate their design process and methods in cleanroom design structure. Through literature review and an actual design case study, this research will conduct the induction and analysis methods to evaluate those design process and methods from the design data as well as to examine their validity and integrity of cleanroom design. It should provide valuable information to the designer and contractor facing the contamination control in the cleanroom project.
中文摘要 ...................................................................................... i
英文摘要 ...................................................................................... ii
誌謝 ...................................................................................... iii
目錄 ...................................................................................... iv
圖目錄 ...................................................................................... vi
表目錄 ...................................................................................... viii
第一章 緒 論............................................................................... 1
1-1 研究目的與動機……...................................................... 1
1-2 文獻回顧.......................................................................... 3
第二章 無塵室系統....................................................................... 6
2-1 無塵室的定義.................................................................. 6
2-2 無塵室的應用.................................................................. 8
2-3 無塵室的系統架構.......................................................... 10
2-4 無塵室的測試標準.......................................................... 18
第三章 無塵室系統設計…....................................................... 23
3-1 設計流程.......................................................................... 23
3-2 設計需求調查.................................................................. 31
3-3 冷房負荷計算.................................................................. 35
3-4 空調設備選用.................................................................. 42
3-5 內裝系統設計.................................................................. 43
3-6 風管系統設計.................................................................. 47
3-7 水管系統設計.................................................................. 49
3-8 電力系統設計.................................................................. 51
3-9 控制系統設計.................................................................. 52
第四章 案例探討與分析........................................................... 56
4-1 系統描述.......................................................................... 56
4-2 系統設計說明.................................................................. 60
4-3 無塵室設計驗證與討論............................................ 81
第五章 結論................................................................................. 97
5-1 結論................................................................................. 97
5-2 建議................................................................................. 97
參考文獻.......................................................................................... 98
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