臺灣博碩士論文加值系統

本研究目的為研發一種量測快速、架設簡單的平行度與平面度量測方法。由於現行的平行度以及平面度量測設備主要以簡易的千分錶為主，如需要更高的精度則需要光學量測儀器如雷射干涉儀，而使用千分錶量測多為依靠人眼記錄以至於的精度不足且誤差大；光學量測設備價格昂貴且架設方式繁複易受量測環境限，以上兩種方法皆需使用基準面。研究中所提出的量測方式訴求不需要架設基準面，因此量測結果皆為相對平行度以及相對平面度，而非使用基準面的絕對平行度與平面度，利用向量的相對概念以量測起始點做為比較基準點，動態量測線性滑軌和掃描待測平面，即可得知相對平行度及相對平面度。相對平行度量測法的實驗與現行業界常用之設備千分錶比較量測結果誤差約在3%以內，此量測方法的穩定度及重現性也遠高於使用千分錶；相對平面度量測的實驗結果也清楚的將實驗用平板的平面度狀態正確的圖形化顯示。

A system used to measure the parallelism and the flatness is developed. The parallelism is measured using two displacement sensors, whereas the flatness is by three. In the proposed measuring methodology; both parallelism and flatness requires no measuring reference which traditionally is made elaborately and expensively, e.g. granite with perfect flatness. Nevertheless the resulting parallelism measured using the proposed system is called relative parallelism and relative flatness instead of parallelism and flatness. The advantage of the proposed measuring parallelism system is not only less expensive but also that the error caused by the fixture motion is avoided. Tests were performed to access the performance of the measuring parallelism system on a pair of straightedge rails installed in parallel on a machine tool with a length of 1715mm and a maximum straightness deviation of 0.02 mm. Results show that the measured deviation in parallelism of rails was less than 3%. The same concept is adopted in the proposed flatness measuring system. A probe that consists of three displacement sensors is designed to validate the flatness measurement methodology. Tests were performed on a metal square plate of 200mm by 200mm. Results show that the flatness of the platecan be measured and then quantified easily.

第一章 緒論
1-1 前言
1-2 研究動機與目的
1-3 文獻回顧
1-3-1 現有量測直線度、平行度和平面度方式的探討
1-3-2 量測輪廓訊號處理方式
1-3-3 機台移動造成誤差訊號偵測方法
1-4 文獻總結與本論文研究方法

第二章 平行度和平面度量測理論
2-1平行度量測理論
2-2 兩點連續、三點連續法介紹
2-3 平面度量測理論
2-3-1 粗糙度與平面度之差異
2-3-2 無支架三感測器量測法
2-3-3 外支撐架應用三感測器量測法
2-3-4 外支撐架應用四個感測器量測法

第三章 實驗設置方法及流程
3-1 實驗流程與架構
3-1-1 平行度量測實驗
3-1-2 平面度量測實驗
3-1-3 感測器介紹
3-2 實驗平台簡介
3-2-1 平行度實驗平台
3-2-2 平面度實驗平台
3-3 量測程式與方法說明

第四章 線性滑軌平行度量測結果
4-1 滾珠螺桿實驗平台A實驗
4-2 滾珠螺桿實驗平台B實驗
4-3 平行度量測結果分析

第五章 平面度量測實驗結果
5-1 平面度量測實驗A
5-2 平面度量測實驗B
5-3 平面度結果分析

第六章 結論與未來研究方向
6-1 結論
6-1-1 平行度量測
6-1-2 平面度量測
6-2 未來研究方向
6-2-1 平行度研究方向
6-2-2 平面度研究方向
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