臺灣博碩士論文加值系統

磁浮的應用已經相當常見，例如磁浮軸承、磁浮列車、磁浮風洞、及高
精密的非接觸式的定位系統等。而對於水平方向的振動隔離系統磁浮是否
能提供極佳的振動隔離？本文將會加以討論並提出實驗結果。磁浮平台水
平定位系統以水平的四個感測器回授磁浮平台的位置，並以八個電磁鐵的
出力來達到磁浮平台水平定位的目的。因磁浮平台的物理特性，所以用相
位領先控制器（phase lead controller）來控制整個磁浮平台水平方向
定位控制。其靜態定位精度為1.5微米，頻寬為5Hz。 至於量測磁浮平台
水平方向被動式振動隔離特性，在量測軸的單邊的兩個電磁鐵輸出一脈衝
力並利用量測軸上的感測器記錄磁浮平台擺動的軌跡，進而分析出磁浮平
台水平方向磁彈性係數及磁阻尼係數約為，也就是在此種設計之下磁浮平
台的水平方向被動式振動隔離頻率為0.3Hz。

Magnetic suspension had been widely applied to many systems
including magnetic bearing,magnetically levitatied vehicles,
precision machines and even wind tunnel. How about the system
apply to vibration isolation in horizontal direction ? In this
thesis we will discuss the problem and descirbe the preliminary
experimental result we achieved. To implemented the magnetic
levitation table, four sensors feedback the position of the
table ,and eight electromagnets as actuators,and three phase
lead controller compansate the phase were in use. In this way
the horizontol postion control system of magnetic levitation
table had the performnace with a position accuracy of 1.5 um
and a system close loop bandwidth of 5 Hz. In measuring the
open loop nature frequency of magnetic levitation table. We
applied an implusive force to the levitated table and record its
motion in the same time. The nature frequency measured is about
0.3 Hz. and the horizontal damping coefficient of the magnetic
levitation table is 0.5 N×sec/m.