臺灣博碩士論文加值系統

由於十二吋半導體機台的構造越來越精密化，因此整合多個獨立的傳動系統，並且快速監視及維修，以維持十二吋半導體機台持續run貨，就是保持高AT( available time )是很重要的，這也是半導體廠裡的設備工程師所需要擁有的觀念。
所以人們常把robot傳動軸當作剛性元件，但在很多的實驗證明，當定位精密時,震動對於整個傳送部影響非常巨大，尤其是現在製程世代的演進，線寬不斷縮小，對於精密度的要求更甚於之前。
所以我希望能找出讓robot穩定性提高的控制方法，利用找出來的馬達控制方法，可以解決晶圓滑片，進而改善破片機率，使得半導體廠的設備工程師可依據此論文框架提出機台的改善案。

Twelve-inch semiconductor FAB due to the construction of more sophisticated machines, thus, integration of multiple independent transmission system, and rapid monitoring and maintenance, in order to maintain continuous twelve-inch semiconductor machine run cargo, it is important to keep the high AT (available time) , which is a semiconductor factory equipment engineer needs to have ideas.
So people often think robot like Stiff element, but in many of the experiments show that when the positioning precision, vibration affects the entire unit for transferring very large, especially now that the evolution process generation, shrinking line width, for precision It requires even more than before.
So I hope to find improved stability allow robot control method of the motor control method to find out, can be solved crystal sleek piece, thus improving the chances of fragments, so that the semiconductor plant equipment engineer to follow proposed framework paper machine accordingly improve case.

誌 謝 i
中 文 摘 要 ii
ABSTRACT iii
目 錄 iv
圖目錄 vi
表目錄 vii
第一章、緒論 1
1.1 研究動機與目的 1
1.2 文獻回顧 2
1.3 研究方法 2
1.4 論文架構 3
第二章、簡化模型研究方法 4
2.1 系統的動態模式 4
2.2 實驗模型的建立 4
2.3 動態模式之參數估測 7
2.4 馬達參數建立 8
2.5 流程圖 10
2.6簡化模型實驗結果及驗證 12
第三章、控制器之設計&挑選 14
3.1 逆向步進控制器 14
3.2 奇異擾動控制器 17
第四章、結論 19
參考文獻 24
附錄A 半導體真空機械手臂 28
附錄B 半導體真空機械手臂控制器 29
附錄C 半導體真空機械手臂控制器皮帶 30
附錄D 半導體真空機械手臂控制器馬達 31
附錄E 半導體真空機械手臂控制器馬達 32
圖目錄
圖2-1 撓性軸示意圖 6
圖2-2 傳送系統示意圖 6
圖2-3 參數估測流程圖 10
圖2-4 參數驗證流程圖 11
圖2-5 步階輸入之模型與實驗比較圖(A=2) 12
圖2-6 弦波輸入之模型與實驗比較圖(A=2) 13
圖3-1 逆向步進控制器設計流程圖 16
圖3-2 奇異擾動控制器設計流程圖 18
圖4-1 逆向步進控制器模擬與實驗結果比較圖(位置輸出) 20
圖4-2 奇異擾動控制器模擬與實驗結果比較圖(位置輸出) 21
圖4-3 逆向步進控制器模擬與實驗結果比較圖(追蹤誤差) 22
圖4-4 奇異擾動控制器模擬與實驗結果比較圖(追蹤誤差) 23
圖A.1 半導體真空機械手臂示意圖 28
圖B.1 半導體真空機械手臂控制器示意圖 29
圖C.1 半導體真空機械手臂控制器皮帶示意圖 30
圖D.1 半導體真空機械手臂控制器馬達維修示意圖 31
圖E.1 半導體真空機械手臂控制器馬達示意圖 32

表目錄
表2-1 馬達各項參數定義表 5
表2-2 系統名稱定義表 7
表2-3 馬達參數值 9
表2-4 步階輸入&弦波輸入之模型實驗比較表 13

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