臺灣博碩士論文加值系統

控擋片回收製程之改善方案的選擇
研究生：簡嘉賢 指導教授：巫木誠 博士
國立交通大學工業工程與管理研究所
摘要
晶圓廠製造過程中，幾乎所有機台都會使用控擋片作為監測、維護機台環境的輔助工具。控擋片可藉由清洗回收、降級和研磨回收以重複使用，來減少全新控片的投入量。而目前研究中多為控擋片降級法則之改善，以降低全新控片投入量，該種研究屬於營運法則之改善，甚少探討有關清洗回收之體質改善的問題。
本研究將探討控擋片清洗回收製程改善時，應該優先選擇那些控擋片的清洗回收製程作改善和改善多少，可以讓全新控片投入量減少最多，以使改善成本發揮最大的效益。本研究透過基因演算法和邊際分配法之協助，可以針對不同的改善預算，找到近似最佳解的改善方案。在比較搜尋時間方面，邊際分配法遠較基因演算法來得快。
關鍵詞：控片、擋片、清洗回收、基因演算法、邊際分配法

lection of Alternatives for Improving Recycle Processes of C/D Wafers
Student：Chia-Shien Chien Advisor：Dr. Muh-Cherng Wu
Institute of Industrial Engineering
National Chiao Tung University
ABSTRACT
Control/dummy (C/D) wafers are used to measure the process quality in semiconductor manufacturing. C/D wafers are reusable by recycle cleaning and can be downgraded to the downstream processes. Previous studies on C/D wafers aimed to reduce the use of C/D wafers by making appropriate downgrade decisions. Yet, the yield improvement in the recycle process C/D wafers is seldom explored.
This research formulates a decision problem and proposes solution methods for the selecting the yield improvement alternatives in the C/D recycle processes. The decision problem is to determine the yield improvement targets for each recycle process in order to minimize the use of C/D wafers, under a given budget for yield improvement. The two solution methods involve a genetic algorithm and a marginal allocation algorithm. The two methods yield same solutions but the marginal allocation method is good in requiring much less computation.
key word：control wafer, dummy wafer, recycle cleaning, genetic algorithm,
marginal allocation

目錄
摘要 I
ABSTRACT II
誌謝 III
目錄 IV
表目錄 V
圖目錄 V
第一章 緒論 1
1.1研究背景 1
1.2研究目的 3
1.3論文章節安排 3
第二章 文獻探討 4
2.1控擋片簡介 4
2.2控擋片安全存量與派工決策 5
2.3控擋片的降級法則分析比較 7
第三章 呂氏模式驗證 11
3.1呂氏模式說明 11
3.2呂氏模式之釋例 15
3.3呂氏模式之驗證 19
3.4呂氏模式之簡化 23
第四章 應用基因演算法和邊際分配法於改善方案的選擇 26
4.1問題描述 26
4.2基因演算法 28
4.3邊際分配法 32
第五章 實例驗證 33
5.1釋例描述與假設 33
5.2基因演算法之參數設定 37
5.3基因演算法搜尋結果 38
5.4邊際分配法與搜尋結果 41
第六章 結論與未來研究方向 43
6.1結論 43
6.2未來研究方向 44
參考文獻 45
表目錄
表3.1一般儲存區的清洗回收次數與良率 16
表3.2各儲存區間降級比例 18
表5.1各儲存區平均需求與清洗回收作業之起始良率 34
表5.2各清洗回收次數之良率改善成本函數 36
表5.3基因演算法重複搜尋三十次的結果 38
表5.4由表5.3求得之平均平與標準差 39
表5.5各儲存區平均總改善率 40
表5.6不同改善增額下，邊際分配法搜尋結果 42
圖目錄
圖2.1控擋片的降級路徑 4
圖3.1儲存區內控擋片等級說明 12
圖3.2降級流程圖 15
圖4.1回收良率改善成本函數 26
圖4. 2控擋片跨區降級關係 27
圖5.1降級流程圖 33
圖5.2染色體結構 34
圖5.3演化過程圖 40

參考文獻
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