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研究生:賴聖評
研究生(外文):Sange-Ping Lay
論文名稱:利用刮痕試驗探討DLC膜層之附著性研究
論文名稱(外文):Adhesion characterization of diamond-like carbon films using scratch test technique
指導教授:徐澤志徐澤志引用關係
指導教授(外文):Tze-Chi Hsu
學位類別:碩士
校院名稱:元智大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
論文頁數:109
中文關鍵詞:類鑽碳膜層刮痕試驗附著性有限元素分析
外文關鍵詞:DLC coatingscratch testbondingfinite element analysis
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本研究利用化學氣相沈積類鑽碳(CVD-DLC、CVD+ -DLC)、物理氣相沈積類鑽碳(PVD-DLC、PVD+ -DLC)共四種不同膜層被覆於碳化鎢基材上,針對類鑽碳膜層與基材之間的附著性做探討及研究。本文利用刮痕測試法(scratch adhesion test),配合聲波放射信號與光學顯微鏡(OM)、掃描式電子顯微鏡(SEM)定義臨界荷重(critical load)來決定附著性的好壞,並觀察刮痕軌跡的破壞型式,最後配合有限元素分析(ANSYS)模擬刮痕試驗與實驗結果做比對,進一步得知當膜層正要脫離基材時,所需要的臨界剪應力,為日後在做刀具模擬分析時的參數設計。
In order to characterize the adhesion of Diamond-like carbon (DLC) coatings on Tungsten Carbide (WC) substrate, the scratch test was used. The scratch test is the most popular method of measuring adhesion. It was performed on a unit equipped with sensors of normal and tangential force, and acoustic emission (AE) signals. The failure occurs during scratch testing was examined by an optical microscope (OM) and a scanning electron microscope (SEM), if this failure event represents coating detachment than which is called the critical load.
In this paper, we used the finite element method to simulate the scratch process. The distributions of the stress field in the coating, and at the interface of the coating/substrate system were investigated. The results of the finite element can be used to simulate bonding strength of coating tool.
書名頁........................................i
論文口試委員會審定書..........................ii
授權書........................................iii
中文摘要......................................iv
英文摘要......................................v
誌謝..........................................vi
目錄..........................................vii
表目錄........................................ix
圖目錄........................................x
符號說明......................................xv

第一章 緒論...................................1
1.1 前言..................................1
1.2 文獻回顧..............................3
1.2.1影響刀具壽命參數及磨耗行為.........3
1.2.2鍍膜技術及膜層附著性...............5
1.3 研究架構..............................15

第二章 理論基礎...............................26
2.1 附著力所做功之理論基礎................26
2.2有限元素法.............................32
2.2.1材料性質定義.......................33
2.2.2接觸分析...........................35

第三章 實驗設備與方法.........................39
3.1 實驗步驟..............................39
3.2 實驗設備..............................40
3.2.1 刮痕試驗機........................40
3.2.2 奈米壓痕機........................41
3.2.3 拉伸試驗機........................46
3.2.4 光學顯微鏡........................47
3.2.5 掃描式電子顯微鏡..................47

第四章 結果與討論.............................58
4.1 壓痕實驗材料性質量測..................58
4.2 刮痕實驗之附著性量測與刮痕軌跡........59
4.2.1 刮痕實驗量測結果..................59
4.2.1 刮痕軌跡破壞型式..................60
4.3 ANSYS分析模擬結果.....................63
4.3.1 模型基本設定......................63
4.3.2 模擬結果與比較....................65
4.3.3 FEM模型的假設與簡化誤差...........68

第五章 結論與建議.............................102
5.1 結論..................................102
5.2 建議..................................103

參考文獻......................................104
個人簡介......................................109
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